Resources Contact Us Home Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE     Plasma processing method and plasma processing apparatus Image Number 6 for United States Patent #7858155. It is intended to provide a plasma processing method and apparatus capable of increasing the uniformity of amorphyzation processing.A prescribed gas is introduced into a vacuum container 1 from a gas supply apparatus 2 through a gas inlet 11 while being exhausted by a turbomolecular pump 3 as an exhaust apparatus through an exhaust hole 12. The pressure in the vacuum container 1 is kept at a prescribed value by a pressure regulating valve 4. High-frequency electric power of 13.56 MHz is supplied from a high-frequency power source 5 to a coil 8 disposed close to a dielectric window 7 which is opposed to a sample electrode 6, whereby induction-coupled plasma is generated in the vacuum container 1. A high-frequency power source 10 for supplying high-frequency electric power to the sample electrode 6 is provided and functions as a voltage source for controlling the potential of the sample electrode 6. A surface crystal layer of a silicon wafer 9 was rendered amorphous successfully by improving the structure of the sample-electrode 6.       Recently Added Patents Sheet for vehicle seats Curable liquid composition, method of coating, inorganic substrate, and semiconductor device System and method for trading and displaying market information in an electronic trading environment Data server system and method Titanate and titania nanostructures and nanostructure assemblies, and methods of making same Medical devices for therapeutic agent delivery with polymeric regions that contain copolymers having both soft segments and uniform length hard segments Electrical closing switch made from reactive composite materials   Randomly Featured Patents Array substrate for liquid crystal display device having conductive patterns and fabricating method thereof Hollow chambered drawer side slide made from metal materials Spinal intervertebral implant adjustable in situ comprising hard pass point Gripper assembly for downhole tools O-ring solenoid valves Method and apparatus to improve magnetic disc drive reliability using excess un-utilized capacity Optical fiber connector assemblies and methods of making the assemblies Agglomerated ores and a producing method therefor Image processing method and apparatus therefor System and method for testing analog to digital converter embedded in microcontroller © 2006-2008 PatentGenius. All Rights Reserved.