Resources Contact Us Home
Plasma processing method and plasma processing apparatus

Image Number 6 for United States Patent #7858155.

It is intended to provide a plasma processing method and apparatus capable of increasing the uniformity of amorphyzation processing.A prescribed gas is introduced into a vacuum container 1 from a gas supply apparatus 2 through a gas inlet 11 while being exhausted by a turbomolecular pump 3 as an exhaust apparatus through an exhaust hole 12. The pressure in the vacuum container 1 is kept at a prescribed value by a pressure regulating valve 4. High-frequency electric power of 13.56 MHz is supplied from a high-frequency power source 5 to a coil 8 disposed close to a dielectric window 7 which is opposed to a sample electrode 6, whereby induction-coupled plasma is generated in the vacuum container 1. A high-frequency power source 10 for supplying high-frequency electric power to the sample electrode 6 is provided and functions as a voltage source for controlling the potential of the sample electrode 6. A surface crystal layer of a silicon wafer 9 was rendered amorphous successfully by improving the structure of the sample-electrode 6.

  Recently Added Patents
High-frequency power amplifier
Modular microscope construction
Position and orientation measurement apparatus, position and orientation measurement method, and storage medium
Sample analyzing device
Digital media content distribution
Plants and seeds of corn variety CV577261
Dehydratable hygiene articles
  Randomly Featured Patents
Control device for synchromesh automatic transmission
Data recording apparatus, reproduction apparatus, recording/reproduction method, and imaging apparatus
Metering system for an apparatus for coating webs of material such as paper, paperboard or cardboard webs
Method of generating exact-length wires for routing critical signals
Indole derivatives and their use as 5-HT1F agonists
Cooler for electronic devices
Conducting polymer films containing nanodispersed catalyst particles: a new type of composite material for technological applications
Reactive yellow dyes useful for ocular devices
Lens manufacturing method thereof, and optical pickup
Process for making alkyl pyrazines