Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Plasma processing method and plasma processing apparatus










Image Number 6 for United States Patent #7858155.

It is intended to provide a plasma processing method and apparatus capable of increasing the uniformity of amorphyzation processing.A prescribed gas is introduced into a vacuum container 1 from a gas supply apparatus 2 through a gas inlet 11 while being exhausted by a turbomolecular pump 3 as an exhaust apparatus through an exhaust hole 12. The pressure in the vacuum container 1 is kept at a prescribed value by a pressure regulating valve 4. High-frequency electric power of 13.56 MHz is supplied from a high-frequency power source 5 to a coil 8 disposed close to a dielectric window 7 which is opposed to a sample electrode 6, whereby induction-coupled plasma is generated in the vacuum container 1. A high-frequency power source 10 for supplying high-frequency electric power to the sample electrode 6 is provided and functions as a voltage source for controlling the potential of the sample electrode 6. A surface crystal layer of a silicon wafer 9 was rendered amorphous successfully by improving the structure of the sample-electrode 6.








 
 
  Recently Added Patents
Blueberry plant named `DrisBlueFour`
Semiconductor device and method of adjusting characteristic thereof
Patterned MR device with controlled shape anisotropy
LED drive circuit
System for providing access to playable media
Vanadium, cobalt and strontium additives for use in aluminum back solar cell contacts
Method for manufacturing thin film transistor and method for manufacturing display device
  Randomly Featured Patents
Case unit including ring-shaped ribs made of resin as guide rails for housing printed-circuit assemblies
Combination envelope and greeting card
Combined ceiling light and vent intake for bathroom and the like
Thermoplastic elastomer compositions
Geranium plant named `Duehaydn`
Camera
Novelty greeting gift apparatus
Backlight module with a heat conductive block
Instrument responsive to back-scattered or back-reflected radiation having passive system for range correction
Bumper for personal watercraft