Resources Contact Us Home
Plasma processing method and plasma processing apparatus

Image Number 6 for United States Patent #7858155.

It is intended to provide a plasma processing method and apparatus capable of increasing the uniformity of amorphyzation processing.A prescribed gas is introduced into a vacuum container 1 from a gas supply apparatus 2 through a gas inlet 11 while being exhausted by a turbomolecular pump 3 as an exhaust apparatus through an exhaust hole 12. The pressure in the vacuum container 1 is kept at a prescribed value by a pressure regulating valve 4. High-frequency electric power of 13.56 MHz is supplied from a high-frequency power source 5 to a coil 8 disposed close to a dielectric window 7 which is opposed to a sample electrode 6, whereby induction-coupled plasma is generated in the vacuum container 1. A high-frequency power source 10 for supplying high-frequency electric power to the sample electrode 6 is provided and functions as a voltage source for controlling the potential of the sample electrode 6. A surface crystal layer of a silicon wafer 9 was rendered amorphous successfully by improving the structure of the sample-electrode 6.

  Recently Added Patents
Single mode optical fiber with improved bend performance
Identification of electrical grid phase information for end-points in a grid network
Information processing apparatus, information processing method, and program
Flat display panel and method for forming the same
Clock face
Peptide vectors
Case for electronic device
  Randomly Featured Patents
Apparatus for injecting a fuel-air mixture for multi-cylinder internal combustion engines
Mounting bracket for arranging different connectors
Data reproducing device
Organic light emitting device (OLED) with thick (100 to 250 nanometers) porphyrin buffer layer
Liquid-crystalline medium
Communication systems and methods
Refractory effusion cell to generate a reproducible, uniform and ultra-pure molecular beam of elemental molecules, utilizing reduced thermal gradient filament construction
Disk drive with an actuator latch having a biasing ball at least partially within a seating cavity adjoining a retention bore
Engine balancer driving mechanism
Semiconductor memory