Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Plasma processing method and plasma processing apparatus










Image Number 6 for United States Patent #7858155.

It is intended to provide a plasma processing method and apparatus capable of increasing the uniformity of amorphyzation processing.A prescribed gas is introduced into a vacuum container 1 from a gas supply apparatus 2 through a gas inlet 11 while being exhausted by a turbomolecular pump 3 as an exhaust apparatus through an exhaust hole 12. The pressure in the vacuum container 1 is kept at a prescribed value by a pressure regulating valve 4. High-frequency electric power of 13.56 MHz is supplied from a high-frequency power source 5 to a coil 8 disposed close to a dielectric window 7 which is opposed to a sample electrode 6, whereby induction-coupled plasma is generated in the vacuum container 1. A high-frequency power source 10 for supplying high-frequency electric power to the sample electrode 6 is provided and functions as a voltage source for controlling the potential of the sample electrode 6. A surface crystal layer of a silicon wafer 9 was rendered amorphous successfully by improving the structure of the sample-electrode 6.








 
 
  Recently Added Patents
Encryption using alternate authentication key
Use of natriuretic peptide for treating heart failure
Interface circuit and interface system
Pointer display device, pointer display/detection method, pointer display/detection program and information apparatus
Methods, systems, and products for providing ring backs
Adjustable high precision surveying device
Pressing mold for optical lenses and method for manufacturing glass optical lenses
  Randomly Featured Patents
Peristaltic pump apparatus
Method of combatting fungi and Pseudomonas solanacerum
Wireless receiver for electronic game machine
Methods of controlling sand and water production in subterranean zones
Polynucleotide phosphorodithioate compounds
Amides from dialkylenetriamines and lubricant and fuel compositions containing same
High level secretory expression system of intact MK family protein
Compressor
System, computer program product and method for managing documents
Organic thin film transistor and method of manufacturing the same, and semiconductor device having the organic thin film transistor