Resources Contact Us Home
Plasma processing method and plasma processing apparatus

Image Number 6 for United States Patent #7858155.

It is intended to provide a plasma processing method and apparatus capable of increasing the uniformity of amorphyzation processing.A prescribed gas is introduced into a vacuum container 1 from a gas supply apparatus 2 through a gas inlet 11 while being exhausted by a turbomolecular pump 3 as an exhaust apparatus through an exhaust hole 12. The pressure in the vacuum container 1 is kept at a prescribed value by a pressure regulating valve 4. High-frequency electric power of 13.56 MHz is supplied from a high-frequency power source 5 to a coil 8 disposed close to a dielectric window 7 which is opposed to a sample electrode 6, whereby induction-coupled plasma is generated in the vacuum container 1. A high-frequency power source 10 for supplying high-frequency electric power to the sample electrode 6 is provided and functions as a voltage source for controlling the potential of the sample electrode 6. A surface crystal layer of a silicon wafer 9 was rendered amorphous successfully by improving the structure of the sample-electrode 6.

  Recently Added Patents
Process for producing a carbon-comprising support
Watch chain
Transcoded images for improved trick play
Method and system for reduction of decoding complexity in a communication system
Efficient paging in a wireless communication system
Method and system for fail-safe call survival
Storage system comprising multiple microprocessors and method for sharing processing in this storage system
  Randomly Featured Patents
Carrier for electrostatic-charged image developer, developer and image forming process using the same, and carrier core material reproducing process
Composite cooking system having microwave heating and induction heating
Tablet accessory for personal electronic devices
Cable shield termination system using clamps and ferrules
Colored paper and substrates coated for enhanced printing performance
Cargo inspection system for special nuclear materials (SNM)
Thermoplastic composite fabrics and formed article produced therefrom
Epoxy compounds for use as components of aqueous coating compositions
Heater and method for deionized water and other liquids
Tape dispenser