Resources Contact Us Home
Plasma processing method and plasma processing apparatus

Image Number 6 for United States Patent #7858155.

It is intended to provide a plasma processing method and apparatus capable of increasing the uniformity of amorphyzation processing.A prescribed gas is introduced into a vacuum container 1 from a gas supply apparatus 2 through a gas inlet 11 while being exhausted by a turbomolecular pump 3 as an exhaust apparatus through an exhaust hole 12. The pressure in the vacuum container 1 is kept at a prescribed value by a pressure regulating valve 4. High-frequency electric power of 13.56 MHz is supplied from a high-frequency power source 5 to a coil 8 disposed close to a dielectric window 7 which is opposed to a sample electrode 6, whereby induction-coupled plasma is generated in the vacuum container 1. A high-frequency power source 10 for supplying high-frequency electric power to the sample electrode 6 is provided and functions as a voltage source for controlling the potential of the sample electrode 6. A surface crystal layer of a silicon wafer 9 was rendered amorphous successfully by improving the structure of the sample-electrode 6.

  Recently Added Patents
Centralized behavioral information system
Pausing a VoiceXML dialog of a multimodal application
Compositions and methods of vascular injury repair
Current collector for lead acid battery
Display screen with graphical user interface
Facility to reuse paper
  Randomly Featured Patents
Fixing apparatus and image forming apparatus using the fixing apparatus
Method and apparatus for automatically realigning a machine element to a predetermined position after power interruption
Pulmonary administration of dry powder formulations for treating infertility
Hermetically sealed current conducting terminal assembly
Image forming apparatus with a belt for conveying sheets
Collapsible shipping container
Adaptive self pumping solar hot water heating system with overheat protection
Method for creating a hole for a permanent fastener that replaces a tacking fastener
Alpha amino acid derivatives-inhibitors of leukocyte adhesion mediated by VLA-4
Latch guard and deep pile fabric circular knitting machine fitted therewith