Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Substrate processing apparatus










Image Number 6 for United States Patent #7854821.

A substrate processing apparatus includes a heat transfer gas supply mechanism to supply a heat transfer gas through a supply passage into a portion between a worktable and a substrate to improve thermal conductivity between therebetween. Under the control of a control section, the pressure inside the supply passage is measured to obtain a pressure measurement value while the substrate is placed on the worktable. Then, a preparatory flow rate of the heat transfer gas to be supplied through the supply passage into the portion between the worktable and substrate is determined, in accordance with the pressure difference between the pressure measurement value and a pressure reference value, prior to a main process to be performed on the substrate. Then, the heat transfer gas is supplied through the supply passage into the portion between the worktable and substrate at the preparatory flow rate, prior to the main process.








 
 
  Recently Added Patents
Method, system and computer program product for verifying floating point divide operation results
Per-request control of DNS behavior
Methods and apparatus for map detection with reduced complexity
Image forming apparatus
Message processing method and apparatus based on the SIP protocol and an IP communication system
Method and apparatus for providing very high throughput operation and capability signaling for wireless communications
Embedded bonding pad for image sensors
  Randomly Featured Patents
Stepped/keying interface stabilization alignment mechanism
Process for the base band modulation of a data signal, as well as the corresponding modulation and demodulation apparatuses
Modifying a hierarchical representation of a circuit to process features created by interactions between cells
Method for storing data, computer program product, ID token and computer system
FM detector circuit with error voltage applied to phase shifting circuit
Flashlight
High frequency power amplifier circuit and electronic component for high frequency power amplifier
High speed sonic logging using multiple transducers
Dereeler for selectively feeding coiled stock into an associated fabricating machine
Timer reservation device and information recording apparatus