Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Substrate processing apparatus










Image Number 6 for United States Patent #7854821.

A substrate processing apparatus includes a heat transfer gas supply mechanism to supply a heat transfer gas through a supply passage into a portion between a worktable and a substrate to improve thermal conductivity between therebetween. Under the control of a control section, the pressure inside the supply passage is measured to obtain a pressure measurement value while the substrate is placed on the worktable. Then, a preparatory flow rate of the heat transfer gas to be supplied through the supply passage into the portion between the worktable and substrate is determined, in accordance with the pressure difference between the pressure measurement value and a pressure reference value, prior to a main process to be performed on the substrate. Then, the heat transfer gas is supplied through the supply passage into the portion between the worktable and substrate at the preparatory flow rate, prior to the main process.








 
 
  Recently Added Patents
High temperature interconnect assemblies for high temperature electronics utilizing transition pads
Integrated circuit package system with exposed interconnects
Overlapping decorative panel set
Image capturing system
Diversity schemes for 2-D encoded data
Multiple application versions
Load balancing algorithm for servicing client requests
  Randomly Featured Patents
Expansion diaphragm-type temperature sensor
Recording medium, playback apparatus, recording method, program, and playback method
High holding voltage dual direction ESD clamp
Bonded semiconductor substrate
Transfer-and-fixation system with preheated printing medium for creating images using liquid-development electrophotographic apparatus
Product and method of producing a smooth polyester yarn
Special wraps, dilators and foley catheters
Gene encoding an anti-complement protein from vaccinia
Manipulation assembly for online electrical system test probe installation
Mobile client computer programmed to display drop down scrolling indicator