Resources Contact Us Home
Method of forming a contact hole and method of manufacturing a semiconductor device having the same

Image Number 12 for United States Patent #7846825.

In a method of forming a contact hole and a method of manufacturing a semiconductor device having the same, a first insulation interlayer is formed on a substrate. A dummy pattern is formed on the first insulation interlayer. A second insulation interlayer is formed to cover the dummy pattern. A photoresist pattern is formed on the second insulation interlayer. The photoresist pattern has an exposed portion. The dummy pattern under the photoresist pattern is arranged to cross over the exposed portion of the photoresist pattern. The first and second insulation interlayers are etched using the photoresist pattern and the dummy pattern as an etching mask, to form a plurality of contact holes on both sides of the dummy pattern. Accordingly, the contact holes may be formed to have a smaller width.

  Recently Added Patents
Method, apparatus, and manufacture for adaptation of video encoder tuning parameters
Method for parking or exiting a parking bay and for avoiding a collision of a vehicle, and corresponding assistance systems and vehicle
Real ear measurement system using thin tube
Controller with screen
Method and apparatus for triggering expiration of a data tag device
System, device and method for transrating file based assets
Image-processing method and program, and image-processing apparatus
  Randomly Featured Patents
Method of fabricating a molding
Method for etching an SiO.sub.2 film
Optical transmitter utilizing a bistable distributed feedback semiconductor laser
Method for processing gaseous effluent streams recovered from the vapor phase oxidation of metal halides
Resilient exercise device
Thickness measuring apparatus, substrate processing method, and substrate processing apparatus
Control of procedures for formation of water-immiscible thermosetting phenol-formaldehyde resins
Method and apparatus for packaging a drug-device combination product
Passive compensation for pole tip protrusion by slider bending
Canister tool