Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Substrate cleaning method, substrate cleaning equipment, computer program, and program recording medium










Image Number 6 for United States Patent #7837804.

In a dry process after a cleaning process using a cleaning-liquid nozzle and a rinse process using a side rinse nozzle are performed on a wafer W, the wafer W is turned, feeding of pure water to a center point of the wafer W from a pure-water nozzle is started, and substantially at the same, injection of a nitrogen gas from a gas nozzle to a center portion of the wafer W at a point at an adequate distance apart from the center of the wafer W is started. Next, while the pure-water nozzle is caused to scan toward the periphery of the wafer W, the gas nozzle is caused to scan toward the periphery of the wafer W in an area radially inward of the position of the pure-water nozzle after the gas nozzle passes the center of the wafer W.








 
 
  Recently Added Patents
Method and apparatus for eliminating a motor vehicle tip-over risk
Lock monitoring
Binder for secondary battery providing excellent adhesion strength and cycle property
Timing controller capable of removing surge signal and display apparatus including the same
Network-based dynamic encoding
5-phenyl-pentanoic acid derivatives as matrix metalloproteinase inhibitors for the treatment of asthma and other diseases
Method for maintaining a driver-independent braking intervention after a collision
  Randomly Featured Patents
Composite glazing with an increase energy absorption and film interlayers that are suitable for said glazing
Production machine for the simultaneous manufacture of continuous cigarette rods
Catalytic system, its method for preparation, and method for preparation of a copolymer of ethylene and a conjugated diene
Restricting memory access to protect data when sharing a common address space
Manufacture of aqueous formaldehyde
Device for detachably linking a wiper blade with a driven wiper arm
Optical measurement arrangement having an ellipsometer
Method for handling inter-RAT measurement and report in a dual-mode user equipment
Processing method for a workpiece
Potting material for electronic components