Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Substrate cleaning method, substrate cleaning equipment, computer program, and program recording medium










Image Number 6 for United States Patent #7837804.

In a dry process after a cleaning process using a cleaning-liquid nozzle and a rinse process using a side rinse nozzle are performed on a wafer W, the wafer W is turned, feeding of pure water to a center point of the wafer W from a pure-water nozzle is started, and substantially at the same, injection of a nitrogen gas from a gas nozzle to a center portion of the wafer W at a point at an adequate distance apart from the center of the wafer W is started. Next, while the pure-water nozzle is caused to scan toward the periphery of the wafer W, the gas nozzle is caused to scan toward the periphery of the wafer W in an area radially inward of the position of the pure-water nozzle after the gas nozzle passes the center of the wafer W.








 
 
  Recently Added Patents
Sink
Output device, source apparatus, television set, system, output method, program, and recording medium
Mechanical and moisture protection apparatus for electronic devices
Methods and apparatus to determine impressions using distributed demographic information
Methods and systems to accomplish variable width data input
Techniques for accessing a parallel database system via external programs using vertical and/or horizontal partitioning
Particle-loaded membrane for solid-phase-extraction and method for performing SALDI-MS analysis of an analyte
  Randomly Featured Patents
Method for joining ceramic sintered bodies
Nest pads
Viral pseudo-capsids including assembly agonists and antagonists
Bathing system controller having abnormal operational condition identification capabilities
Process for reducing slag build-up
Sharing data in a user virtual address range with a kernel virtual address range
Process for producing textured coatings
Method for making a diffused back-side layer on a bonded-wafer with a thick bond oxide
Method and apparatus for forming a continuous reinforced fibrous web
Top drive interlock