Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Protection of conductors from oxidation in deposition chambers










Image Number 6 for United States Patent #7829457.

In some embodiments, after depositing conductive material on substrates in a deposition chamber, a reducing gas is introduced into as the chamber in preparation for unloading the substrates. The deposition chamber can be a batch CVD chamber and the deposited material can be a metal nitride, e.g., a transition metal nitride such as titanium metal nitride. As part of the preparation for unloading substrates from the chamber, the substrates may be cooled and the chamber is backfilled with a reducing gas to increase the chamber pressure. It has been found that oxidants can be introduced into the chamber during this time. The introduction of a reducing gas has been found to protect exposed metal-containing films from oxidation during the backfill and/or cooling process. The reducing gas is formed of a reducing agent and a carrier gas, with the reducing agent being a minority component of the reducing gas. By providing a reducing agent, the effects of oxidation on exposed metal-containing films is reduced, therefore enhancing the conductive properties of the metal films.








 
 
  Recently Added Patents
Data communication system, data transmitting apparatus, data transmitting method, and method for determining packet size and redundancy
Variety corn line NPAA2675
(4950
Method of patterning color conversion layer and method of manufacturing organic EL display using the patterning method
Biometric data display system and method
Method for implementing dynamic pseudorandom keyboard remapping
Systems and methods for switching supply load current estimation
  Randomly Featured Patents
Gyrase inhibitors and uses thereof
Method and apparatus for protecting ongoing system integrity of a software product using digital signatures
Simple and robust digital code tracking loop for wireless communication systems
Memory card connector
Module for measuring tire pressure
Flat display apparatus
Method of magnetic transfer for perpendicular recording medium
Surface enhancing coating for gypsum-containing floor underlayments
Automatically closing modesty curtain
Short-arc discharge lamp