Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Protection of conductors from oxidation in deposition chambers










Image Number 3 for United States Patent #7829457.

In some embodiments, after depositing conductive material on substrates in a deposition chamber, a reducing gas is introduced into as the chamber in preparation for unloading the substrates. The deposition chamber can be a batch CVD chamber and the deposited material can be a metal nitride, e.g., a transition metal nitride such as titanium metal nitride. As part of the preparation for unloading substrates from the chamber, the substrates may be cooled and the chamber is backfilled with a reducing gas to increase the chamber pressure. It has been found that oxidants can be introduced into the chamber during this time. The introduction of a reducing gas has been found to protect exposed metal-containing films from oxidation during the backfill and/or cooling process. The reducing gas is formed of a reducing agent and a carrier gas, with the reducing agent being a minority component of the reducing gas. By providing a reducing agent, the effects of oxidation on exposed metal-containing films is reduced, therefore enhancing the conductive properties of the metal films.








 
 
  Recently Added Patents
White polyester film and surface light source therewith
System and method for wireless messaging in a wireless communication system
Quantitative oxygen imaging systems and methods using echo-based single point imaging
Wrench
Organic compounds
Projector
Cascode circuit device with improved reverse recovery characteristic
  Randomly Featured Patents
Semiconductor memory
Ultrasonic doppler meter
Liquid developer
System, architecture, and method for minimizing power consumption and increasing performance in electric vehicles
Diagnostic system for profiling micro-beams
Image formation device and computer-readable record medium
Safety cap for a cannula
Open cycle ocean thermal energy conversion steam control and bypass system
Color video signal recording and/or reproducing system
Apparatus for measuring the relative difficulty in donning a glove