Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Protection of conductors from oxidation in deposition chambers










Image Number 3 for United States Patent #7829457.

In some embodiments, after depositing conductive material on substrates in a deposition chamber, a reducing gas is introduced into as the chamber in preparation for unloading the substrates. The deposition chamber can be a batch CVD chamber and the deposited material can be a metal nitride, e.g., a transition metal nitride such as titanium metal nitride. As part of the preparation for unloading substrates from the chamber, the substrates may be cooled and the chamber is backfilled with a reducing gas to increase the chamber pressure. It has been found that oxidants can be introduced into the chamber during this time. The introduction of a reducing gas has been found to protect exposed metal-containing films from oxidation during the backfill and/or cooling process. The reducing gas is formed of a reducing agent and a carrier gas, with the reducing agent being a minority component of the reducing gas. By providing a reducing agent, the effects of oxidation on exposed metal-containing films is reduced, therefore enhancing the conductive properties of the metal films.








 
 
  Recently Added Patents
Lid for a container
Parallel processing computer systems with reduced power consumption and methods for providing the same
Lentiviral gene transfer vectors and their medicinal applications
Apparatus for generating electrical energy from rocking activated energy
Liquid crystal display and method of driving the same
Generating network topology parameters and monitoring a communications network domain
Device for producing a connection grid with an integrated fuse
  Randomly Featured Patents
Overheat detecting apparatus for engine
Method for temperature compensation of measured values of a turbidity sensor in an automatic washing machine or diswasher
Image sensor with improved optical response uniformity
Methods and apparatus for selectively processing eggs having identified characteristics
Backhoe attachment for skid loaders
Detachable joystick for a portable computer
Sorting system including an improved reject mechanism
Wristwatch with easily replaceable strap and with prop for standing it on a surface
Memory cell with buffered-layer
Capillary with contained inner chamfer