Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Variable volume plasma processing chamber and associated methods










Image Number 14 for United States Patent #7824519.

A plasma processing chamber includes a substrate support having a top surface defined to support a substrate in a substantially horizontal orientation within the chamber. The plasma processing chamber also includes a number of telescopic members disposed within the chamber outside a periphery of the substrate support. The number of telescopic members are also disposed in a concentric manner with regard to a center of the top surface of the substrate support. Each of the number of telescopic members is defined to be independently moved in a substantially vertical direction so as to enable adjustment of an open volume above the top surface of the substrate support, and thereby enable adjustment of a plasma condition within the open volume above the top surface of the substrate support.








 
 
  Recently Added Patents
Generation of interpolated samples for decision based decoding
Segmented display panel and camera with segmented display
Chair
Time sharing type autostereoscopic display apparatus and method for driving the same
Data processor with virtual machine management
Stereoscopic display
Lid for a container
  Randomly Featured Patents
Control device
Composition having reduced nephrotoxocity comprising a fatty acid containing component and cyclosporine
Contextual ad matching strategies that incorporate author feedback
Nitride cantilevers with single crystal silicon tips
Human wingless-like gene
Novel VI improver, dispersant, and anti-oxidant additive and lubricating oil composition containing same
Stable polymer emulsion composition capable of giving a thromboresistant surface, and process for production thereof
Method for closed-loop control of the instant of ignition
Closure device for an in particular evacuable cylindrical housing
Printing system and method of setting same, information processing apparatus and storage medium