Resources Contact Us Home
Data preparation for multiple mask printing

Image Number 4 for United States Patent #7802226.

A method for preparing data to create two or more masks required to print a desired feature pattern with a multiple mask technique. In one embodiment of the invention, a target feature pattern is separated into two or more groups or data layers with a coloring algorithm. Coloring conflicts or adjacent features that are within a predetermined distance of each other and are assigned to the same group or data layer are identified. Cutting boxes are added to a feature to divide a feature into two or more smaller features. A coloring algorithm is re-applied to the layout including the cutting boxes to assign the features into different groups or data layers. Data in each group or data layer is used to define a mask to print the target feature pattern.

  Recently Added Patents
Monofocal photographing lens assembly
Method and apparatus for content-aware resizing of data chunks for replication
Method for generating codewords
Method and mobile device for awareness of language ability
Single-pass Barankin Estimation of scatterer height from SAR data
Pre-primed roofing membrane
Redundant parallel operation of motor vehicle electrical system generators
  Randomly Featured Patents
Knife handle
Patient simulator
Handle barrier in a molded case for a miniature circuit breaker
End link assembly for an automotive vehicle suspension system
Mailing system
Stitch and trim methods for double patterning compliant standard cell design
Method and system for metadata-driven document management and access control
Method and apparatus for multiple electrospray emitters in mass spectrometry
Active-matrix liquid crystal display
Method and apparatus for U.P.C./EAN symbology ambiguous character compensation by localized thermal energy dot adjustment