Resources Contact Us Home
Electrostatic actuator, liquid droplet discharging head, methods for manufacturing them, and liquid droplet discharging apparatus

Image Number 15 for United States Patent #7766456.

To allow formation of an insulation film to be applied even to a glass substrate without depending on a substrate material so as to improve pressure generated by an electrostatic actuator, as well as to achieve improvement in driving stability and driving durability of the electrostatic actuator at a low cost. [Solving Means] An electrostatic actuator including an individual electrode 5 formed on a substrate, a vibration plate 6 arranged opposite to the individual electrode 5 via a predetermined gap and a driving means for causing a displacement of the vibration plate 6 by generating an electrostatic force between the individual electrode 5 and the vibration plate 6 includes an insulation film 7 provided on one or both of opposing surfaces of the fixed electrode and the movable electrode and a surface protection film 8 provided on the insulation film 7. The surface protection film 8 is made of a hard ceramic film or a hard carbon film.

  Recently Added Patents
Systems and methods for sensing external magnetic fields in implantable medical devices
Subpixel-based image down-sampling
Lubricating oil compositions
Latch-up free ESD protection
State detection device, electronic apparatus, measurement system and program
Pre and post-paid real time billing convergence system
Method and device for authenticating transmitted user data
  Randomly Featured Patents
Computing load management method and system
Production of saturated siloxane polymers from aromatic monomers
Divinyl compounds and chromogenic recording-material prepared by using thereof
Dual ion injector for tandem accelerators
Seat belt connector
Guide device for sheet
Motor-driven screw driver
Mechanism for providing motive force and for pumping applications
Flat bracket for dual band cellular/GPS antennas
Automatic steering means for a driverless carriage