Resources Contact Us Home
Electrostatic actuator, liquid droplet discharging head, methods for manufacturing them, and liquid droplet discharging apparatus

Image Number 15 for United States Patent #7766456.

To allow formation of an insulation film to be applied even to a glass substrate without depending on a substrate material so as to improve pressure generated by an electrostatic actuator, as well as to achieve improvement in driving stability and driving durability of the electrostatic actuator at a low cost. [Solving Means] An electrostatic actuator including an individual electrode 5 formed on a substrate, a vibration plate 6 arranged opposite to the individual electrode 5 via a predetermined gap and a driving means for causing a displacement of the vibration plate 6 by generating an electrostatic force between the individual electrode 5 and the vibration plate 6 includes an insulation film 7 provided on one or both of opposing surfaces of the fixed electrode and the movable electrode and a surface protection film 8 provided on the insulation film 7. The surface protection film 8 is made of a hard ceramic film or a hard carbon film.

  Recently Added Patents
Security access protection for user data stored in a cloud computing facility
Bend resistant cable
Digital signal processing apparatus, liquid crystal display apparatus, digital signal processing method and computer program
Vehicle location information-based abnormal driving determination and warning system
Method, system and computer program product for managing funds in custodial deposit accounts
Avirulent oncolytic herpes simplex virus strains engineered to counter the innate host response
Method for parking or exiting a parking bay and for avoiding a collision of a vehicle, and corresponding assistance systems and vehicle
  Randomly Featured Patents
Self-distracting cage
Reversible and irreversible water-based coatings
Ski boot with flex control
Free-flowing blends of hexa(methoxymethyl)-melamine, carbon black and silica compounds
Heat switch
On-board fuel vapor separation for multi-fuel vehicle
Apparatus for brewing a drink
Tripod cooking device
Steam generating plant