Resources Contact Us Home
Electrostatic actuator, liquid droplet discharging head, methods for manufacturing them, and liquid droplet discharging apparatus

Image Number 15 for United States Patent #7766456.

To allow formation of an insulation film to be applied even to a glass substrate without depending on a substrate material so as to improve pressure generated by an electrostatic actuator, as well as to achieve improvement in driving stability and driving durability of the electrostatic actuator at a low cost. [Solving Means] An electrostatic actuator including an individual electrode 5 formed on a substrate, a vibration plate 6 arranged opposite to the individual electrode 5 via a predetermined gap and a driving means for causing a displacement of the vibration plate 6 by generating an electrostatic force between the individual electrode 5 and the vibration plate 6 includes an insulation film 7 provided on one or both of opposing surfaces of the fixed electrode and the movable electrode and a surface protection film 8 provided on the insulation film 7. The surface protection film 8 is made of a hard ceramic film or a hard carbon film.

  Recently Added Patents
Method and system for a low-power client in a wide area network
Atmospheric treater with roller confined discharge chamber
Cover opening and closing unit and image forming apparatus including the same
Isolated Australian coral reef fluorescent proteins and cell-based kinase or phosphatase platforms for cancer drug development
Metal-containing compositions and method of making same
Heating pad
  Randomly Featured Patents
Outer air seal for a gas turbine engine
Variable vane seal and washer
Computer system and program product for controlling vibrations
Bordetella parapertussis whole-cell vaccine composition
Process for the production of foamed polyolefin sheets
Closure cap for closing non-rotationally symmetrical or eccentric mouthpiece openings of bottle containers
Engine for an airplane
Automatic yarn cutting mechanism
Driving force transmitting device for vehicle
Method for degrading polychlorinated biphenyls and novel microorganism