Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Substrate processing apparatus having gas side flow via gas inlet










Image Number 3 for United States Patent #7700054.

An object of the present invention is to improve substrate processing efficiency. A substrate processing apparatus has a reaction tube that processes a substrate inside, and a heating apparatus disposed so as to surround an external periphery of the reaction tube, so that at least a gas inlet tube is disposed on a side surface in an area in which the substrate is processed inside the reaction tube, and the heating apparatus has a heat insulator that surrounds the reaction tube, an inlet opening formed in the shape of a groove in the heat insulator from the lower end of the heating apparatus so as to avoid the gas inlet tube, and a heating element disposed between the heat insulator and the reaction tube.








 
 
  Recently Added Patents
Wideband multi-channel receiver with fixed-frequency notch filter for interference rejection
Wheel
Recording apparatus, recording method, reproducing apparatus, reproducing method, program, and recording/producing apparatus
Device and method for producing a fluidic connection between cavities
Fine grain voltage scaling of back biasing
Automatic actuator for breakers or switches
Generating a network map
  Randomly Featured Patents
Semiconductor device having trench with vertically formed field oxide
Apparatus and system for a battery pack assembly used during mechanical ventilation
Device and method providing pacing and anti-tachyarrhythmia therapies
Apparatus for reducing crosstalk in the supply and return channels during fluid droplet ejecting
Device and method for limiting the extent to which circuits in integrated circuit dice electrically load bond pads and other circuit nodes in the dice
Optical medium judging method for avoiding the collision of an objective lens with a disk
Grooved substrates for uniform underfilling solder ball assembled electronic devices
Device for deciding pole-zero parameters approximating spectrum of an input signal
Secondary regulation in a multiple output flyback topology
Intercepting call communications within an intelligent network