Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for bonding substrates and method for irradiating particle beam to be utilized therefor










Image Number 3 for United States Patent #7686912.

A substrate bonding method for mutually bonding substrates, has a first radiation step for irradiating the surfaces of the individual substrates with an oxygen particle beam, a second radiation step for irradiating the surfaces of the individual substrate with a nitrogen particle beam simultaneously with or subsequently to the first radiation step, and a step for stacking the individual substrates and bringing the surfaces thereof into close contact. Particularly, the substrates which have been irradiated first with an oxygen plasma and subsequently with a nitrogen plasma are stacked and bonded.








 
 
  Recently Added Patents
Non-transitory computer readable recording medium storing print management program, print management device, print management method, and print system
Glove
Safety device and method for electric heating appliances
Credit flow control scheme in a router with flexible link widths utilizing minimal storage
Method and system for evaluating/analyzing patent portfolio using patent priority approach
Piezoelectric speaker and method of manufacturing the same
Load balancing in shortest-path-bridging networks
  Randomly Featured Patents
Connection for flexible cable and speedometer
Rotary combustion engine apex seal arrangement
Local annealing treatment for cube-on-edge grain oriented silicon steel
Gaming apparatus and playing method thereof
Process to wash polymers contaminated with polychlorinated biphenyls (PCBs)
Apparatus for locating sections of a wind instrument
Dog leash untangler for more than one dog
Partial intron sequence of von hippel-lindau (VHL) disease gene and its use in diagnosis of disease
Method of making sintered contact component
Bypass/leakage cooling of electric pump