Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for bonding substrates and method for irradiating particle beam to be utilized therefor










Image Number 3 for United States Patent #7686912.

A substrate bonding method for mutually bonding substrates, has a first radiation step for irradiating the surfaces of the individual substrates with an oxygen particle beam, a second radiation step for irradiating the surfaces of the individual substrate with a nitrogen particle beam simultaneously with or subsequently to the first radiation step, and a step for stacking the individual substrates and bringing the surfaces thereof into close contact. Particularly, the substrates which have been irradiated first with an oxygen plasma and subsequently with a nitrogen plasma are stacked and bonded.








 
 
  Recently Added Patents
Integrated disk driving module including a stepping motor integrally formed with a base unit
Unsupervised document clustering using latent semantic density analysis
RFID reader revocation checking using low power attached displays
Voltage level shift circuits and methods
Architecture, system and method for testing resistive type memory
Image enhancement based on multiple frames and motion estimation
Image forming apparatus and information processing apparatus
  Randomly Featured Patents
Pharmaceutical composition having dopaminergic activity
Film
Steamer apparatus
Certified email system and method
Apparatus for forming a pour hole and main sprue in an investment mold for lost wax casting
Ink gestures
Polyester adhesives
Intermodulation antiinterference device for superheterodyne receiver
Content delivery system and method
Method of mounting and isolating automotive exhaust systems