Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for bonding substrates and method for irradiating particle beam to be utilized therefor










Image Number 3 for United States Patent #7686912.

A substrate bonding method for mutually bonding substrates, has a first radiation step for irradiating the surfaces of the individual substrates with an oxygen particle beam, a second radiation step for irradiating the surfaces of the individual substrate with a nitrogen particle beam simultaneously with or subsequently to the first radiation step, and a step for stacking the individual substrates and bringing the surfaces thereof into close contact. Particularly, the substrates which have been irradiated first with an oxygen plasma and subsequently with a nitrogen plasma are stacked and bonded.








 
 
  Recently Added Patents
Leadless integrated circuit packaging system and method of manufacture thereof
Flat panel display
Image processing system and method
Detection of code-based malware
Method and apparatus for performing real time anomaly detection
3D structured memory devices and methods for manufacturing thereof
High gradient lens for charged particle beam
  Randomly Featured Patents
Process for separating alkyl-substituted naphthalene derivatives using clathrate complexes
Method and apparatus for filling flexible pouches
Olefin copolymer VI improvers and lubricant compositions and uses thereof
Pivot apparatus
Copolymers for optical fibers
Hose coupling
Antagonists of the magnesium binding defect as therapeutic agents and methods for treatment of abnormal physiological states
Programmed presentation system
Intervertebral implant
Method and system for supporting the evaluation of a picture of an eye