Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method of manufacturing semiconductor device










Image Number 14 for United States Patent #7682927.

A method for manufacturing a semiconductor device includes coating a solution containing a perhydrosilazane polymer on a substrate, heating the solution to form a film containing the perhydrosilazane polymer, and oxidizing the film in a water vapor atmosphere at a reduced pressure to convert the film into an insulating film containing silicon and oxygen.








 
 
  Recently Added Patents
Image forming apparatus
Apparatus and method for multiplying frequency of a clock signal
Hybrid coatings and associated methods of application
Method for driving electrophoretic display device, electrophoretic display device, and electronic device
Titanium compounds and complexes as additives in lubricants
Solid-state imaging device and method for manufacturing the same
Case of electronic device having antenna pattern embedded therein and mold and method for manufacturing the same
  Randomly Featured Patents
Multipurpose system for cartridge valves to mix hot and cold water
Method for fabricating capacitor of semiconductor memory device
Apparatus for mixing and dispensing a multicomponent composition
Method and apparatus suitable for demand forecasting
Bridged metallocene complexes, process for preparing the same and use thereof
Circlips
Activity-based system and method for reducing gain imbalance in a bayer pattern and digital camera employing the same
Mechanism to protect data saved on a local register cache during inter-subsystem calls and returns
Chaperones in a distributed system
Method for brazing rotor bars to end rings of a rotor for an asynchronous AC motor