Resources Contact Us Home
Method for manufacturing semiconductor device background

Image Number 3 for United States Patent #7662727.

To improve a step coverage and a loading effect, without inviting a deterioration of throughput and an increase of cost, in a method for forming a thin film by alternately flowing a raw material and alcohol to a processing chamber. The method includes: loading a silicon wafer having a surface terminated by H into a processing chamber; supplying alcohol to supply the alcohol into the processing chamber as a first gas; first purging to discharge the first gas from an inside of the processing chamber; supplying a raw material to supply a source gas into the processing chamber as a second gas; second purging to discharge the second gas from the inside of the processing chamber; generating a desired thin film on the silicon wafer by setting as one cycle at least the aforementioned supplying alcohol, first purging, supplying the raw material, and second purging, and by repeating this cycle a prescribed number of times; and unloading the silicon wafer, with said desired thin film generated thereon, from the inside of the processing chamber.

  Recently Added Patents
Measurement system service for a vehicle instrument panel
Packet communication system and packet communication method, and node and user device
Information recording medium and information processing method for accessing content with license or copyright protection
Method of treating a preceramic material
Integrated touch screen
Power saving methods for wireless systems
  Randomly Featured Patents
Spreadable food metered dispenser system
Dual automobile jack for consumer use
Method for selective chemical vapor deposition of nanotubes
Swaying hoisted load-piece damping control apparatus
Cable locking and sealing process for sensor
Umbrella with an illumination device
Electronic camera apparatus for instant and conventional photography, and video cameras
Method and apparatus for improving the signal-to-clutter ratio of an airborne earth penetrating radar
Musical instrument assembly
Sealing cannula device