Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for enhancing electrode surface area in DRAM cell capacitors










Image Number 7 for United States Patent #7573121.

Methods for forming the lower electrode of a capacitor in a semiconductor circuit, and the capacitors formed by such methods are provided. The lower electrode is fabricated by forming a texturizing underlayer and then depositing a conductive material thereover. In one embodiment of a method of forming the lower electrode, the texturizing layer is formed by depositing a polymeric material comprising a hydrocarbon block and a silicon-containing block, over the insulative layer of a container, and then subsequently converting the polymeric film to relief or porous nanostructures by exposure to UV radiation and ozone, resulting in a textured porous or relief silicon oxycarbide film. A conductive material is then deposited over the texturizing layer resulting in a lower electrode have an upper roughened surface. In another embodiment of a method of forming the lower electrode, the texturizing underlayer is formed by depositing overlying first and second conductive metal layers and annealing the metal layers to form surface dislocations, preferably structured as a periodic network. A conductive metal is then deposited in gaseous phase, and agglomerates onto the surface dislocations of the texturizing layer, forming nanostructures in the form of island clusters. The capacitor is completed by depositing a dielectric layer over the formed lower electrode, and forming an upper capacitor electrode over the dielectric layer. The capacitors are particularly useful in fabricating DRAM cells.








 
 
  Recently Added Patents
Method of preparing enteric hard capsule and enteric hard capsule prepared thereby
Integrated circuit devices having conductive structures with different cross sections
Endotracheal tube
Method and apparatus for a battery docking connector having reserve power for hot battery swap
Use of physical deformation during scanning of an object to generate views of the object
Detachably integrated battery charger for mobile cell phones and like devices
Orbing and lighting systems
  Randomly Featured Patents
Weighted fishing hook
Method and system for sticky key prevention for keyboard or keypad devices
Power MOSFET
Compact electrocatalytic sewage treatment unit for maritime use
Lift vehicle with multiple capacity envelope control system and method
Servo system for a videodisc player carriage assembly
Drive circuit for insulated gate device
Reconfigurable beam-forming network that provides in-phase power to each region
Method for fabricating sintered annular nuclear fuel pellet through rod-inserted sintering
Engine particulate filter regeneration