Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for enhancing electrode surface area in DRAM cell capacitors










Image Number 7 for United States Patent #7573121.

Methods for forming the lower electrode of a capacitor in a semiconductor circuit, and the capacitors formed by such methods are provided. The lower electrode is fabricated by forming a texturizing underlayer and then depositing a conductive material thereover. In one embodiment of a method of forming the lower electrode, the texturizing layer is formed by depositing a polymeric material comprising a hydrocarbon block and a silicon-containing block, over the insulative layer of a container, and then subsequently converting the polymeric film to relief or porous nanostructures by exposure to UV radiation and ozone, resulting in a textured porous or relief silicon oxycarbide film. A conductive material is then deposited over the texturizing layer resulting in a lower electrode have an upper roughened surface. In another embodiment of a method of forming the lower electrode, the texturizing underlayer is formed by depositing overlying first and second conductive metal layers and annealing the metal layers to form surface dislocations, preferably structured as a periodic network. A conductive metal is then deposited in gaseous phase, and agglomerates onto the surface dislocations of the texturizing layer, forming nanostructures in the form of island clusters. The capacitor is completed by depositing a dielectric layer over the formed lower electrode, and forming an upper capacitor electrode over the dielectric layer. The capacitors are particularly useful in fabricating DRAM cells.








 
 
  Recently Added Patents
System and method for agitation of multiple specimen containers
Translation system adapted for query translation via a reranking framework
Method for switching between virtualized and non-virtualized system operation
Methods and apparatuses for anti-shading correction with extended color correlated temperature dependency
System and method for detecting malicious code executed by virtual machine
Systems and methods for adaptive blind mode equalization
Topology discovery, control channel establishment, and datapath provisioning within an aggregation network with centralized control
  Randomly Featured Patents
Headlight for motor vehicle
Hair clip
Vehicle lamp with multiple-wall support structure
Layered, multi-element electron-bremsstrahlung photon converter target
Fluid container with a thermally responsive insulating side wall
Method for lubricating metal-metal contact systems in metalworking operations with cyclohexyl esters
Kit for radiolabeling ligands with yttrium-90
Self servicing fire extinguisher with external operated internal mixing with wide mouth and external CO.sub.2 chamber
Method of surface coating medical implants
Lamp