Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for enhancing electrode surface area in DRAM cell capacitors










Image Number 7 for United States Patent #7573121.

Methods for forming the lower electrode of a capacitor in a semiconductor circuit, and the capacitors formed by such methods are provided. The lower electrode is fabricated by forming a texturizing underlayer and then depositing a conductive material thereover. In one embodiment of a method of forming the lower electrode, the texturizing layer is formed by depositing a polymeric material comprising a hydrocarbon block and a silicon-containing block, over the insulative layer of a container, and then subsequently converting the polymeric film to relief or porous nanostructures by exposure to UV radiation and ozone, resulting in a textured porous or relief silicon oxycarbide film. A conductive material is then deposited over the texturizing layer resulting in a lower electrode have an upper roughened surface. In another embodiment of a method of forming the lower electrode, the texturizing underlayer is formed by depositing overlying first and second conductive metal layers and annealing the metal layers to form surface dislocations, preferably structured as a periodic network. A conductive metal is then deposited in gaseous phase, and agglomerates onto the surface dislocations of the texturizing layer, forming nanostructures in the form of island clusters. The capacitor is completed by depositing a dielectric layer over the formed lower electrode, and forming an upper capacitor electrode over the dielectric layer. The capacitors are particularly useful in fabricating DRAM cells.








 
 
  Recently Added Patents
Floor standing rack
Method and system for Bluetooth low power link layer connection setup
Pattern forming method using printing device and method of manufacturing liquid crystal display device using the same
Testing SQL query writing skills
Permutational memory cells
Determination and presentation of package pricing offers in response to customer interest in a product
(4943
  Randomly Featured Patents
Interconnecting paving stones
Method for converting ammonia in a gas stream to nitrogen
Electrical clip connector comprising expandable barrel segment
Rasp hub for tire retreading machine
Parametric timing analysis
Solid merchandise dispensing system for mechanical or electrical control
Electrically operated railroad switch machine
Tetrahydroindoloisoquinolines
Semiconductor device and methods for fabricating same
Hanging file box