Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for enhancing electrode surface area in DRAM cell capacitors










Image Number 7 for United States Patent #7573121.

Methods for forming the lower electrode of a capacitor in a semiconductor circuit, and the capacitors formed by such methods are provided. The lower electrode is fabricated by forming a texturizing underlayer and then depositing a conductive material thereover. In one embodiment of a method of forming the lower electrode, the texturizing layer is formed by depositing a polymeric material comprising a hydrocarbon block and a silicon-containing block, over the insulative layer of a container, and then subsequently converting the polymeric film to relief or porous nanostructures by exposure to UV radiation and ozone, resulting in a textured porous or relief silicon oxycarbide film. A conductive material is then deposited over the texturizing layer resulting in a lower electrode have an upper roughened surface. In another embodiment of a method of forming the lower electrode, the texturizing underlayer is formed by depositing overlying first and second conductive metal layers and annealing the metal layers to form surface dislocations, preferably structured as a periodic network. A conductive metal is then deposited in gaseous phase, and agglomerates onto the surface dislocations of the texturizing layer, forming nanostructures in the form of island clusters. The capacitor is completed by depositing a dielectric layer over the formed lower electrode, and forming an upper capacitor electrode over the dielectric layer. The capacitors are particularly useful in fabricating DRAM cells.








 
 
  Recently Added Patents
Image forming unit having agitating portion and image forming apparatus
Resource capacity monitoring and reporting
Tools and methods for yield-aware semiconductor manufacturing process target generation
Live-attenuated compositions for bacterial infections
Messenger bag
Method and structure of forming backside through silicon via connections
Controller
  Randomly Featured Patents
Air bag and folding method
Table top cooking appliance
Line filter
Translucent reflective liquid crystal display
Brake friction pad
Flash fixing apparatus and printer using the same
Driver circuit for a camera autofocus laser diode with provision for fault protection
Meter strip and method for lateral flow assay devices
Grow-mat for cultivating plants and a method for manufacturing same
Magnetic separation device