Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for enhancing electrode surface area in DRAM cell capacitors










Image Number 3 for United States Patent #7573121.

Methods for forming the lower electrode of a capacitor in a semiconductor circuit, and the capacitors formed by such methods are provided. The lower electrode is fabricated by forming a texturizing underlayer and then depositing a conductive material thereover. In one embodiment of a method of forming the lower electrode, the texturizing layer is formed by depositing a polymeric material comprising a hydrocarbon block and a silicon-containing block, over the insulative layer of a container, and then subsequently converting the polymeric film to relief or porous nanostructures by exposure to UV radiation and ozone, resulting in a textured porous or relief silicon oxycarbide film. A conductive material is then deposited over the texturizing layer resulting in a lower electrode have an upper roughened surface. In another embodiment of a method of forming the lower electrode, the texturizing underlayer is formed by depositing overlying first and second conductive metal layers and annealing the metal layers to form surface dislocations, preferably structured as a periodic network. A conductive metal is then deposited in gaseous phase, and agglomerates onto the surface dislocations of the texturizing layer, forming nanostructures in the form of island clusters. The capacitor is completed by depositing a dielectric layer over the formed lower electrode, and forming an upper capacitor electrode over the dielectric layer. The capacitors are particularly useful in fabricating DRAM cells.








 
 
  Recently Added Patents
System and method for reducing antivirus false positives
Techniques for forming a contact to a buried diffusion layer in a semiconductor memory device
Methods and systems for identifying and changing resolutions to cause an aspect ratio of a printed image to match an aspect ratio of image data
Quinoid thiophene organic photoelectric material, preparation method thereof and application thereof
Image processing device, image forming apparatus, and non-transitory computer readable recording medium
Conductive polymer and a solid electrolytic capacitor using the same as a solid electrolyte
Deadline-driven parallel execution of queries
  Randomly Featured Patents
Collar microphone
Walking beam furnace
Tycon II reversible necktie
Method for making Si/SiC composite material
Process for high engagement embossing on substrate having non-uniform stretch characteristics
Quantification of carnitine levels in dialysis patients
Heat curable adhesive coating
Fixed spacer hot line tap
Transfecting compounds which are sensitive to reducing conditions, pharmaceutical compositions containing them and their applications
Opto-magnetic recording polarization optical apparatus including a laser diode and a light absorbing film