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Method to form selective strained Si using lateral epitaxy










Image Number 12 for United States Patent #7572712.

Embodiments for FET devices with stress on the channel region by forming stressor regions under the source/drain regions or the channel region and forming a selective strained Si using lateral epitaxy over the stressor regions. In a first example embodiment, a lateral epitaxial layer is formed over a stressor region under a channel region of an FET. In a second example embodiment, a lateral S/D epitaxial layer is formed over S/D stressor region under the source/drain regions of an FET. In a third example embodiment, both PFET and NFET devices are formed. In the PFET device, a lateral S/D epitaxial layer is formed over S/D stressor region under the source/drain regions. In the NFET device, the lateral epitaxial layer is formed over a stressor region under a channel region of the NFET.








 
 
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