Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method and apparatus for an improved upper electrode plate with deposition shield in a plasma processing system










Image Number 14 for United States Patent #7566379.

The present invention presents an improved upper electrode for a plasma processing system, wherein the design and fabrication of an electrode plate with a deposition shield coupled to the upper electrode advantageously provides gas injection of a process gas with substantially minimal erosion of the upper electrode while providing protection to a chamber interior.








 
 
  Recently Added Patents
Process and intermediates for preparing lapatinib
System and method for associating financial transaction data with a user's project data using a portable electronic device
Apparatus and method for exerting force on a subject tissue
Support member, rotation device comprising such a support and rolling bearing assembly including such a detection device
PVD coated tool
Device for accurately measuring concentration of component in blood and control method of the device
Nano-pigment inkjet ink composition that has a low odor and is environmentally-friendly
  Randomly Featured Patents
Semiconductor light-emitting device and method of manufacturing the same
Biological systems incorporating stress-inducible genes and reporter constructs for environmental biomonitoring and toxicology
Structural element assembly for constructing a motor bus
Production of carbon fiber-tantalum carbide composites
Multimode radio communication system
Method of optimizing the compression of image data, with automatic selection of compression conditions
High emissivity filament for energy conserving incandescent lamps with infrared radiation returning envelopes
Chemical sensor array evaluation method
Photosensitive plates with diazonium composition layer and polyurethane photopolymer with unsaturation in side chain overlayer
Lumbar support device