Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method and apparatus for an improved upper electrode plate with deposition shield in a plasma processing system










Image Number 14 for United States Patent #7566379.

The present invention presents an improved upper electrode for a plasma processing system, wherein the design and fabrication of an electrode plate with a deposition shield coupled to the upper electrode advantageously provides gas injection of a process gas with substantially minimal erosion of the upper electrode while providing protection to a chamber interior.








 
 
  Recently Added Patents
Group handover method and apparatus in broadband wireless communication system that supports mobile relay station
Verification of operating self modifying code
Motor driving circuit
System and method for associating data relating to features of a data entity
System for automatically gathering battery information
Method of manufacturing toner and toner manufactured by the method
Synthetic gecko adhesive attachments
  Randomly Featured Patents
Bib and dish combination
Multifunctional avionic display
Infrared imaging methods and systems
Hardfacing method and nickel based hardfacing alloy
Power controller for supplying power voltage to functional block
Bending-mode latching relay
Propagation of information on an indexed addressed network
Method of and device for determining the contour of a body by means of radiation scattered by the body
Oil lamp
Structure of motion toy