Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method and apparatus for an improved upper electrode plate with deposition shield in a plasma processing system










Image Number 14 for United States Patent #7566379.

The present invention presents an improved upper electrode for a plasma processing system, wherein the design and fabrication of an electrode plate with a deposition shield coupled to the upper electrode advantageously provides gas injection of a process gas with substantially minimal erosion of the upper electrode while providing protection to a chamber interior.








 
 
  Recently Added Patents
Multilevel directory assistance apparatus and method
Methods and devices for detecting and measuring environmental conditions in high performance device packages
Vacuum cleaner filter adapter ring
Method and system for an integrated host PCI I/O bridge and dual port gigabit ethernet controller
Process to extract quassinoids
Facial recognition using a sphericity metric
Adjusting dental prostheses based on soft tissue
  Randomly Featured Patents
Receiver and method with enhanced performance for CDMA transmission
Bandwidth updating method and bandwidth updating apparatus
Simulator for automatic vehicle transmission controllers
Metamaterials and methods of making the same
Method and apparatus for noise reduction particularly in hearing aids
Thermoelectric module having reduced spacing between semiconductor elements
Heat pipe having wick structure
Image forming apparatus that detects the state of the casing of the image forming apparatus
Method of assessing degree of acoustic confusability, and system therefor
Method of assembling a dynamoelectric machine