Resources Contact Us Home
Method of manufacturing polysilicon thin film and method of manufacturing thin film transistor having the same

Image Number 10 for United States Patent #7557050.

In a method of manufacturing a polysilicon thin film and a method of manufacturing a TFT having the thin film, a laser beam is irradiated on a portion of an amorphous silicon thin film to liquefy the portion of the amorphous silicon thin film. The amorphous silicon thin film is on a first end portion of a substrate. The liquefied silicon is crystallized to form silicon grains. The laser beam is shifted from the first end portion towards a second end portion of the substrate opposite the first end portion by an interval in a first direction. The laser beam is then irradiated onto a portion of the amorphous silicon thin film adjacent to the silicon grains to form a first polysilicon thin film. Therefore, electrical characteristics of the amorphous silicon thin film may be improved.

  Recently Added Patents
Method and apparatus for cutting high quality internal features and contours
Signal routing dependent on a loading indicator of a mobile node
Use of beta-adrenoceptor antagonists for the manufacture of a medicament of the treatment of disorders of the outer retina
System and method for generating profile morphing using cephalometric tracing data
Portion of display panel or screen with an icon
Power surface mount light emitting die package
  Randomly Featured Patents
System and method for a mixer circuit with anti-series transistors
Betaketosulphones derivatives suitable to the use as polymerization photoinitiators and photopolymerizable systems containing the same
Compressor protection and diagnostic system
Separation material
Dedicated microcomputer-based control system for steam turbine-generators
Method for controlling operation of microprocessor which performs duty cycle correction process
Electric heater assembly with in-line thermostat
Camera system
Method and apparatus for thermal isolation of a gas sensor
Showerhead apparatus