Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Polishing pad, use thereof and method for manufacturing the same










Image Number 2 for United States Patent #7556555.

The present invention mainly relates to a polishing pad comprising a base material comprising fibers; a membrane with low permeability; and a buffer layer formed between the base material and an upper surface of the membrane with low permeability and embedded into the fibers of the base material. A method of polishing a substrate comprising using the polishing pad and a method for manufacturing the polishing pad as described above are also provided.








 
 
  Recently Added Patents
Recording device, recording method, and program
Non-volatile semiconductor memory and data processing method in non-volatile semiconductor memory
Downlink scheduling in fractional frequency reuse (FFR) systems
Motor drive component verification system and method
Measuring apparatus for measuring a physical property of a sample
Method and apparatus for analysis of histopathology images and its application to cancer diagnosis and grading
In-vehicle electronic control apparatus having monitoring control circuit
  Randomly Featured Patents
Retractable hook weedless fishing tackle
Glow discharge method and apparatus and photoreceptor devices made therewith
Heater for process fluids
Three wavelength optical measurement apparatus and method
Method and system for foreground detection using multi-modality fusion graph cut
Injection molded microlenses for optical interconnects
Mat having a padded portion
Ceramic abradable material with alumina dopant
Adaptive scaling for decoding spatially periodic self-clocking glyph shape codes
Image forming apparatus and power transmission unit having a plurality of intermediate gears usable with the same