Resources Contact Us Home
Method of cleaning silicon nitride layer

Image Number 3 for United States Patent #7468325.

A method of cleaning a silicon nitride layer on a substrate is provided to effectively remove negative-charged impurities such as polymer and particle from the silicon nitride layer. In the method, the zeta potential of the silicon nitride layer is changed from positive to negative, and then the silicon nitride layer is cleaned with a first solution selected from an alkali solution and an NC-2 solution. So the negatively-charged impurities can be easily removed due to a repulsion force. The substrate can be treated with spin scrubber or quick dump rinse before and/or after the changing of the zeta potential. To change the zeta potential, the substrate can be dipped into a second solution such as an SC-1 solution, an NC-2 solution, and an alkali solution.

  Recently Added Patents
Method and apparatus for disease diagnosis and screening using extremely low frequency electromagnetic fields
Preventative traffic congestion social networking improvement system within a community
Method and apparatus for power management control of an embedded memory having sleep and shutdown features
Stacked thin-film superlattice thermoelectric devices
Cell surface display, screening and production of proteins of interest
Multiple angle bend for high-voltage lines
Hydrogenolysis of ethyl acetate in alcohol separation processes
  Randomly Featured Patents
Liquid level assembly with diaphragm seal
Sound producing play apparatus
Magnetic head with lower coil traces connected to integrally formed vertical interconnects and upper coil traces through plural insulating layer arrangement
Speaker system
Apparatus and method for aligning a weatherstrip guideway with a receiving slot
Decoder for compressed and multiplexed video and audio data
System and method for recirculating fluid supply for an injector for a semiconductor fabrication chamber
Method for controlling the local characteristics of a non-woven textile and related installation
Fail safe control device
Pneumatic bias tire with carcass plies having different cord angle