Resources Contact Us Home
Method of cleaning silicon nitride layer

Image Number 3 for United States Patent #7468325.

A method of cleaning a silicon nitride layer on a substrate is provided to effectively remove negative-charged impurities such as polymer and particle from the silicon nitride layer. In the method, the zeta potential of the silicon nitride layer is changed from positive to negative, and then the silicon nitride layer is cleaned with a first solution selected from an alkali solution and an NC-2 solution. So the negatively-charged impurities can be easily removed due to a repulsion force. The substrate can be treated with spin scrubber or quick dump rinse before and/or after the changing of the zeta potential. To change the zeta potential, the substrate can be dipped into a second solution such as an SC-1 solution, an NC-2 solution, and an alkali solution.

  Recently Added Patents
Quinoid thiophene organic photoelectric material, preparation method thereof and application thereof
Information distribution system, information distributing method, node, and recording medium
Electromagnetic probe for measuring properties of a subsurface formation
Switching element for a valve train of an internal combustion engine
Reflective mask blank and method of manufacturing a reflective mask
Random sampling for geophysical acquisitions
Information processing apparatus, including updating of program and program information, and method of updating program of the information processing apparatus
  Randomly Featured Patents
Ink jet printing apparatus and ink jet printing method
Front-loading syringe adapter for front-loading medical injector
Push button controlled police baton with ball bearing locking mechanism
Pyrotechnic priming device having a microlens set by a shape memory material and pyrotechnic chain utilizing said device
Special purpose fluid dispenser
Rapid, quantitative peptide synthesis using mixed anhydrides
Heat exchanger device for refrigeration driers in compressed-air installations and tube/plate heat exchangers for use in the latter
Photographic processing tray
Computerized identification of normal and abnormal diurnal cortisol secretion patterns and levels of testosterone from human saliva samples
Fuel-injection valve for internal combustion engine