Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method of cleaning silicon nitride layer










Image Number 3 for United States Patent #7468325.

A method of cleaning a silicon nitride layer on a substrate is provided to effectively remove negative-charged impurities such as polymer and particle from the silicon nitride layer. In the method, the zeta potential of the silicon nitride layer is changed from positive to negative, and then the silicon nitride layer is cleaned with a first solution selected from an alkali solution and an NC-2 solution. So the negatively-charged impurities can be easily removed due to a repulsion force. The substrate can be treated with spin scrubber or quick dump rinse before and/or after the changing of the zeta potential. To change the zeta potential, the substrate can be dipped into a second solution such as an SC-1 solution, an NC-2 solution, and an alkali solution.








 
 
  Recently Added Patents
Wireless communication system, wireless communication device, wireless communication method, and program
Nonvolatile semiconductor memory device and method for controlling the same
Thermal conductivity and phase transition heat transfer mechanism including optical element to be cooled by heat transfer of the mechanism
Virtual links in a routed ethernet mesh network
Stable pharmaceutical composition and methods of using same
Signal conversion control circuit for touch screen and method thereof
Coding circuitry for difference-based data transformation
  Randomly Featured Patents
Methods and computer systems for reducing runtimes in material requirements planning
Bone conductive hearing aid
Airbag cushion comprising sewn reinforcement seams
Top loading cam activated test socket for ball grid arrays
Methods and systems for a collections model for loans
Variable capacitors including tandem movers/bimorphs and associated operating methods
Virtual page turn
Variable geometry turbocharger with stand-off members
System and process for providing improved database interfacing using query objects
Hydraulic coupling fluid clutches