Resources Contact Us Home
Cleaning method and solution for cleaning a wafer in a single wafer process

Image Number 19 for United States Patent #7456113.

The present invention is a method of use of a novel cleaning solution in a single wafer cleaning process. According to the present invention the method involves using a cleaning solution in a single wafer mode and the cleaning solution comprises at least ammonium hydroxide (NH.sub.4OH), hydrogen peroxide (H.sub.2O.sub.2), water (H.sub.2O) and a chelating agent. In an embodiment of the present invention the cleaning solution also contains a surfactant. Moreover, the present invention also teaches a method of combining an ammonia hydroxide, hydrogen peroxide, and chelating agent step with a short HF step in a fashion that minimizes process time in a way that the entire method removes aluminum and iron contamination efficiently without etching too much oxide.The single wafer cleaning processes may also be used to increase the yield of high-grade reclaimed wafers.

  Recently Added Patents
Stage drive method and stage unit, exposure apparatus, and device manufacturing method
Battery power management system and method
Method and system and policy server for guaranteeing data not to be interrupted
Process for improving the hydrolysis of cellulose in high consistency systems using one or more unmixed and mixed hydrolysis reactors
Fabricated leaf tea products
Determining system for localization methods combination
  Randomly Featured Patents
Ball-joint support for thin parts
Apparatus for imaging light from a laser diode onto a multi-channel linear light valve
Reduction of errors during computation of inverse discrete cosine transform
Method and apparatus for constructing verification test sequences by euler touring a test subsequence graph
Inherently light-and-heat-stabilized polyamide and method of making the same
Process for the preparation of granules based on expandable thermoplastic polymers and relative product
Method and apparatus for user identification based on permuted kernels
Enhanced pad design for solder attach devices
Two-wheeled hand trucks
Golf ball holder