Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Cleaning method and solution for cleaning a wafer in a single wafer process










Image Number 15 for United States Patent #7456113.

The present invention is a method of use of a novel cleaning solution in a single wafer cleaning process. According to the present invention the method involves using a cleaning solution in a single wafer mode and the cleaning solution comprises at least ammonium hydroxide (NH.sub.4OH), hydrogen peroxide (H.sub.2O.sub.2), water (H.sub.2O) and a chelating agent. In an embodiment of the present invention the cleaning solution also contains a surfactant. Moreover, the present invention also teaches a method of combining an ammonia hydroxide, hydrogen peroxide, and chelating agent step with a short HF step in a fashion that minimizes process time in a way that the entire method removes aluminum and iron contamination efficiently without etching too much oxide.The single wafer cleaning processes may also be used to increase the yield of high-grade reclaimed wafers.








 
 
  Recently Added Patents
Integrated emergency medical database system
Warm air generating apparatus, sheet feeding apparatus, and image forming apparatus including warm air generating apparatus and sheet feeding apparatus
Single check memory devices and methods
Method and apparatus for triggering expiration of a data tag device
Video editing apparatus
Measurement protocol for a medical technology apparatus
Superconducting magnetizer
  Randomly Featured Patents
Sidearm mounting and locking apparatus
Patient lift
Digital method and apparatus for monitoring moisture content
Enzyme-immobilization carriers and preparation thereof
Substituted succinate esters and low-calorie oils containing them
Compact multiple aperture imaging array
Surface cleaning apparatus
Thermal printer with power save feature
Method of and apparatus for scrambling a video signal with full network transmission and recording capability
Data communication apparatus for combining data with the same identification information