Resources Contact Us Home
Apparatus and method of making a grayscale photo mask and an optical grayscale element

Image Number 15 for United States Patent #7436423.

An apparatus and method for making a grayscale photo mask and a three-dimensional grayscale diffractive optical element operate as follows. A grayscale photo mask is obtained by exposing a laser direct write (LDW) glass material to laser beam radiation from a first laser beam of modulated power moved over a grid of discrete locations on the LDW material, the modulated power being in accordance with grayscale pattern data, and, while the first laser beam is moved over the discrete locations of the grid, exposing the grid to a second laser beam, the power of the second laser beam being less than the bleach threshold of the glass material, to provide each of the discrete locations with a gray scale level to provide a predetermined gray scale pattern of varying optical transmissivity on the LDW material to produce a grayscale mask. An optical element is obtained by exposing a photoresist layer on a wafer to radiation transmitted through the grayscale mask; and removing material from the photoresist layer to provide a predetermined varying thickness of the photoresist layer as determined by the gray scale patterns on the grayscale mask to produce the three-dimensional grayscale diffractive optical element. The optical element may be a diffraction grating. The power of the second laser exposed on said discrete locations may be between about 50 mW and about 5 W, and the power of the first laser exposed on the discrete locations may be between about 20 mW and about 500 mW.

  Recently Added Patents
Double extension for a tree stand
MBS data transmission method, base station, MBS data receiving method, and user equipment
Procedure for the prognostic of a structure subject to loads
Connector for light source module and backlight assembly having the same
RF system for reducing intermodulation (IM) products
Cleaning composition for treating tissue for transplantation derived from human/animal
  Randomly Featured Patents
Methods of tracking fluids produced from various zones in a subterranean well
Method and data processor with reduced stalling due to operand dependencies
Mutant male sterile gene of soybean
Bent type zoom optical system, and imager, information processor and electronic camera apparatus incorporating the same
Method of manufacturing inversion type IC's and IC module using same
Gas turbine combustor
Telephone digital data interface console
Process for preparing thiazolobenzimidazoles and intermediates used therein
Electrode for electric double-layer capacitor, and slurry for forming the same
Device for securing a punch to a press brake