Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Apparatus and method of making a grayscale photo mask and an optical grayscale element










Image Number 15 for United States Patent #7436423.

An apparatus and method for making a grayscale photo mask and a three-dimensional grayscale diffractive optical element operate as follows. A grayscale photo mask is obtained by exposing a laser direct write (LDW) glass material to laser beam radiation from a first laser beam of modulated power moved over a grid of discrete locations on the LDW material, the modulated power being in accordance with grayscale pattern data, and, while the first laser beam is moved over the discrete locations of the grid, exposing the grid to a second laser beam, the power of the second laser beam being less than the bleach threshold of the glass material, to provide each of the discrete locations with a gray scale level to provide a predetermined gray scale pattern of varying optical transmissivity on the LDW material to produce a grayscale mask. An optical element is obtained by exposing a photoresist layer on a wafer to radiation transmitted through the grayscale mask; and removing material from the photoresist layer to provide a predetermined varying thickness of the photoresist layer as determined by the gray scale patterns on the grayscale mask to produce the three-dimensional grayscale diffractive optical element. The optical element may be a diffraction grating. The power of the second laser exposed on said discrete locations may be between about 50 mW and about 5 W, and the power of the first laser exposed on the discrete locations may be between about 20 mW and about 500 mW.








 
 
  Recently Added Patents
Liposomes with improved drug retention for treatment of cancer
Base station apparatus and method for use in mobile communication system
Event-triggered server-side macros
Touchscreen with extended conductive pattern
Imidazole derivatives used as TAFIa inhibitors
Systems for usage based rate limiting over a shared data link
System for wireless local area network (WLAN) transmission and for coexistence of WLAN and another type of wireless transmission and methods thereof
  Randomly Featured Patents
Method for preparing oxybisphthalimides
Cutting device
Device for driving light source module
Collapsible headgear
Process for producing ethanol
Self cleaning steam iron
Polymer membranes on the basis of polyvinylidene fluoride, a process for the production thereof and their use
Small, battery operated RF transmitter for portable audio devices for use with headphones with RF receiver
Combination pinch roller and carriage guide for printer
Catalyst regeneration