Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Apparatus and method of making a grayscale photo mask and an optical grayscale element










Image Number 15 for United States Patent #7436423.

An apparatus and method for making a grayscale photo mask and a three-dimensional grayscale diffractive optical element operate as follows. A grayscale photo mask is obtained by exposing a laser direct write (LDW) glass material to laser beam radiation from a first laser beam of modulated power moved over a grid of discrete locations on the LDW material, the modulated power being in accordance with grayscale pattern data, and, while the first laser beam is moved over the discrete locations of the grid, exposing the grid to a second laser beam, the power of the second laser beam being less than the bleach threshold of the glass material, to provide each of the discrete locations with a gray scale level to provide a predetermined gray scale pattern of varying optical transmissivity on the LDW material to produce a grayscale mask. An optical element is obtained by exposing a photoresist layer on a wafer to radiation transmitted through the grayscale mask; and removing material from the photoresist layer to provide a predetermined varying thickness of the photoresist layer as determined by the gray scale patterns on the grayscale mask to produce the three-dimensional grayscale diffractive optical element. The optical element may be a diffraction grating. The power of the second laser exposed on said discrete locations may be between about 50 mW and about 5 W, and the power of the first laser exposed on the discrete locations may be between about 20 mW and about 500 mW.








 
 
  Recently Added Patents
Plants having enhanced yield-related traits and a method for making the same
Ternary thermoelectric material containing nanoparticles and process for producing the same
Marking device docking stations having security features and methods of using same
Decklid assembly for a vehicle
Hybrid simulation system and method
Network throttle method and system
Processing method for cleaning sulfur entities of contact regions
  Randomly Featured Patents
Intrapipe work robot apparatus and method of measuring position of intrapipe work robot
Adherent controlled release pesticides using organo polysiloxanes
Charge detectors for CCD registers
Motor protection switch
Cordless electric hair-dryer
Vacuum packaging machine
Connector for shielded pair cable with grounding drain conductor
Swivel wheel mount
Enhanced bulk porosity of polymer structures via plasma technology
Front face of a vehicle wheel