Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method of protecting a bond layer in a substrate support adapted for use in a plasma processing system










Image Number 6 for United States Patent #7431788.

A method of protecting a bond layer in a substrate support adapted for use in a plasma processing system. The method includes the steps of attaching an upper member of a substrate support to a lower member of a substrate support with a bonding material. An adhesive is applied to an outer periphery of the upper member and to an upper periphery of the lower member, and a protective ring is positioned around the outer periphery of the upper member and the upper periphery of the lower member. The protective ring is originally fabricated with dimensions that provide mechanical stability and workability. The protective ring is then machined to an exact set of final dimensions consistent with the design of the substrate support application.








 
 
  Recently Added Patents
Hand sign
Vacuum cleaner
Liquid formulations of carboxamide arthropodicides
Interaction analysis and prioritization of mobile content
Method for detecting security error in mobile telecommunications system and device of mobile telecommunications
Method for spore detection
Aqueous composition with agents to inhibit water evaporation
  Randomly Featured Patents
Antenna for combined personal digital assistant and navigation device
Powder filling device
Atmospheric burner for heating furnaces
Subaperture processing for clutter reduction in synthetic aperture radar images of ground moving targets
Aquatic plant removal rake
Toner, and toner production process
Hydraulically controlled diaphragm pump for high pressures
System to convert liquid fuel to gas
Semiconductor capacitor device
Safety electrical tap