Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method of protecting a bond layer in a substrate support adapted for use in a plasma processing system










Image Number 6 for United States Patent #7431788.

A method of protecting a bond layer in a substrate support adapted for use in a plasma processing system. The method includes the steps of attaching an upper member of a substrate support to a lower member of a substrate support with a bonding material. An adhesive is applied to an outer periphery of the upper member and to an upper periphery of the lower member, and a protective ring is positioned around the outer periphery of the upper member and the upper periphery of the lower member. The protective ring is originally fabricated with dimensions that provide mechanical stability and workability. The protective ring is then machined to an exact set of final dimensions consistent with the design of the substrate support application.








 
 
  Recently Added Patents
Method of making a low-Rdson vertical power MOSFET device
Deadline-driven parallel execution of queries
Bi-directional, compact, multi-path and free space channel replicator
Endotracheal tube
Bus controller for handling split transactions
Apparatus for restoring setting information of a board management controller from a backup memory before loading an OS when a system board is replaced
Micromechanical component, device for beam deflection of monochromatic light, and spectrometer
  Randomly Featured Patents
Conversion of LPG hydrocarbons to distillate fuels or lubes using integration of LPG dehydrogenation and MOGDL
Instruction queue capable of changing the order of reading instructions
Printing system with independently movable printhead service modules
Resin composition, adhesive film using the same and multilayer printed circuit board
Method and apparatus for controlling the intensity of a laser beam used to record/reproduce data to/from an optical disc
Read/modify/write circuit for computer memory operation
Switched power pack with protective device for limiting output voltage
Light-amount adjusting apparatus, optical apparatus, and method for manufacturing the light-amount adjusting apparatus
Thin film transistor structure having increased on-current
Method of soldering together two components