Resources Contact Us Home
Lithographic apparatus

Image Number 3 for United States Patent #7423730.

A lithographic apparatus including means for selectively transmitting a projection beam before imaging the patterned projection beam onto a substrate. The means may include any of the following: a selectively transmitting device disposed downstream of a patterning device in the direction of the projection beam, a fixed and a moving set of masking blades in a scanning system or an array of switchable elements. The means may be provided to a mask table/holder or to a frame or structure of the lithographic projection apparatus.

  Recently Added Patents
System and method for computational unification of heterogeneous implicit and explicit processing elements
Field emission cathode device and field emission display using the same
Transmission apparatus, receiving apparatus, method, and storage medium
Biodiesel data collection system
Hybrid interconnect scheme including aluminum metal line in low-k dielectric
Gas cap removal tool
  Randomly Featured Patents
System and method for medium access control in a power-save network
Intracoronary exchange apparatus and method
Method for preparing conductive electrochemically active material
Telescoping flagpole
Construction of a multicarrier signal
Water-repellent filter, a method of manufacturing a water-repellent filter member, and gas sensor
Storage type photosensor containing silicon and hydrogen
Lens array, manufacturing method thereof, LED head having lens array, exposure device having LED head, image forming apparatus having exposure device, and reading apparatus
Resin composition for laser engraving, resin printing plate precursor for laser engraving, relief printing plate and method for production of relief printing plate
Error scanning in flash memory