Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Apparatus and method for electron beam inspection with projection electron microscopy










Image Number 19 for United States Patent #7420167.

An apparatus and method for electron beam inspection with projection electron microscopy, is constructed so as to allow correction of changes in focus offsets due to changes in the electrically charged state particularly during inspection. The apparatus includes: a focus measure sensor unit; a focus measure calculation unit which calculates focus measure from the multiple image signals converted by the focus measure sensor unit; a focus position calculation unit which calculates the height of a confocal plane conjugate to the plane of convergence of a planar electron beam by an objective lens, on the basis of the calculated focus measure, and then calculates the focus position of the objective lens on the basis of the calculated height of the confocal plane; and a focus position correction unit which corrects the focus position of the objective lens according to the calculated focus position of the objective lens.








 
 
  Recently Added Patents
Projector
Graphical user interfaces and occlusion prevention for fisheye lenses with line segment foci
Glow in the dark swim goggle frame and band
Fusing device to prevent overheating of a heating member and image forming apparatus having the same
Managing delivery of application server content
Managing distributed applications using structural diagrams
Pattern identification apparatus, control method and program thereof
  Randomly Featured Patents
Dual elevators
Optical pick-up apparatus and divergent angle-converting element
Patient support garment system
Water treatment system
Air management apparatus and method having manifold and pass-through components
Method for determining the quantitative composition of a powder sample
Accessible pedestrian signal system
Fungicidal compositions containing piperidine compounds
Flat conductor cable
Method of making an SRAM cell and structure