Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Apparatus and method for electron beam inspection with projection electron microscopy










Image Number 19 for United States Patent #7420167.

An apparatus and method for electron beam inspection with projection electron microscopy, is constructed so as to allow correction of changes in focus offsets due to changes in the electrically charged state particularly during inspection. The apparatus includes: a focus measure sensor unit; a focus measure calculation unit which calculates focus measure from the multiple image signals converted by the focus measure sensor unit; a focus position calculation unit which calculates the height of a confocal plane conjugate to the plane of convergence of a planar electron beam by an objective lens, on the basis of the calculated focus measure, and then calculates the focus position of the objective lens on the basis of the calculated height of the confocal plane; and a focus position correction unit which corrects the focus position of the objective lens according to the calculated focus position of the objective lens.








 
 
  Recently Added Patents
Method and apparatus for producing homogeneous magnetic fields
Imaging apparatus, control method thereof, and program
Solution based precursors
Apparatus, electronic component and method for generating reference voltage
Imaging lens having five lens elements, and electronic apparatus having the same
Rose plant named `Esm R068`
Cooler
  Randomly Featured Patents
Magnetic recording layer formed on a photographic film and having an identification code which identifies information segments, and method for recording the same
Method for removing tin
Wet tissue dispensing port
Magnetic tape data management method and apparatus
Azeotrope-like compositions of tetrafluoropropene and hydrofluorocarbons
Buckle for use with a pretensioner
ATM repeater using hardware implemented transfer destination searching to reduce processor load
Seaming machine for mufflers
Self-focusing linear charged particle accelerator structure
System and method used for configuration of an inspection compliance tool with machine readable tags and their associations to inspected components