Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Apparatus and method for electron beam inspection with projection electron microscopy










Image Number 19 for United States Patent #7420167.

An apparatus and method for electron beam inspection with projection electron microscopy, is constructed so as to allow correction of changes in focus offsets due to changes in the electrically charged state particularly during inspection. The apparatus includes: a focus measure sensor unit; a focus measure calculation unit which calculates focus measure from the multiple image signals converted by the focus measure sensor unit; a focus position calculation unit which calculates the height of a confocal plane conjugate to the plane of convergence of a planar electron beam by an objective lens, on the basis of the calculated focus measure, and then calculates the focus position of the objective lens on the basis of the calculated height of the confocal plane; and a focus position correction unit which corrects the focus position of the objective lens according to the calculated focus position of the objective lens.








 
 
  Recently Added Patents
Semiconductor device
Mixed reactant flow-by fuel cell
Position and orientation measurement apparatus, position and orientation measurement method, and storage medium
Context-sensitive views
Hybrid asynchronous transmission process
Lead with lead stiffener for implantable electrical stimulation systems and methods of making and using
Method and system for generating and displaying an interactive dynamic selective view of multiply connected objects
  Randomly Featured Patents
State monitoring unit for assembled battery
Optical apparatus
Lamp-ballast-system with integrated cooling circuit
Conversion of stripe-geometry junction laser emission to a spherical wavefront
Broadcast signal receiver and tape recorder and, method of detecting additional information channel
Dual automatic insertion device
Preparation of 4-methoxybenzonitrile perfume compositions
Photographic device having light-blocking film
Dental practitioner's accessory
Enhanced energetic composites