Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Apparatus and method for electron beam inspection with projection electron microscopy










Image Number 19 for United States Patent #7420167.

An apparatus and method for electron beam inspection with projection electron microscopy, is constructed so as to allow correction of changes in focus offsets due to changes in the electrically charged state particularly during inspection. The apparatus includes: a focus measure sensor unit; a focus measure calculation unit which calculates focus measure from the multiple image signals converted by the focus measure sensor unit; a focus position calculation unit which calculates the height of a confocal plane conjugate to the plane of convergence of a planar electron beam by an objective lens, on the basis of the calculated focus measure, and then calculates the focus position of the objective lens on the basis of the calculated height of the confocal plane; and a focus position correction unit which corrects the focus position of the objective lens according to the calculated focus position of the objective lens.








 
 
  Recently Added Patents
Wound dressings
Memory management configuration
Jewelry
Elementary network description for efficient link between neuronal models and neuromorphic systems
Method for delivering a volatile material
Media used in digital high speed inkjet web press printing
Electrode structure and its manufacturing method, and semiconductor module
  Randomly Featured Patents
Selective tone event detector and method therefor
Developing unit having support units to minimize deformation from heat and pressure, and image forming apparatus having the same
Switched-voltage control of the magnetization of current transforms and other magnetic bodies
Optical reproducing method for optical medium with aligned prepit portion
Self-tapping implant
Mobile partition wall
Method for hydrogenation of coal
System and method of monitoring, predicting and optimizing production yields in a liquid crystal display (LCD) manufacturing process
Refrigerator
Circuit arrangement