Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method of manufacturing a superjunction device










Image Number 7 for United States Patent #7410891.

A partially manufactured semiconductor device includes a semiconductor substrate. The device includes a first oxide layer formed on the substrate, with a mask placed over the oxide-covered substrate, a plurality of first trenches and at least one second trench etched through the oxide layer forming mesas. The at least one second trench is deeper and wider than each of the first trenches. The device includes a second oxide layer that is disposed over an area of mesas and the plurality of first trenches. The device includes a layer of masking material that is deposited over a an area of an edge termination region adjacent to an active region. The area of mesas and first trenches not covered by the masking layer is etched to remove the oxidant seal. The device includes an overhang area that is formed by a wet process etch.








 
 
  Recently Added Patents
Leg stretching device
Method and device for extracting vapors in an injection molding machine
Mask blank, transfer mask, and film denseness evaluation method
Canine iPS cells and method of producing same
Distributed mobile access point acquisition
Image processing apparatus and image processing method
Adhesive structure of optical device, adhesion method, and optical pickup device
  Randomly Featured Patents
Radial piston pump for high pressure fuel supply
Flexible liner for drilled drainhole deployment
Temperature indicating paint
Reinforced lacrosse head
Fabricating method of semiconductor device
Temperature compensation of thin film diode voltage threshold in memory sensing circuit
Door handle
Electromagnetic relay
Device for condensing volatile organic compounds from a storage or transport tank into oil
Homeostatic insulin pump