Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Reducing wire erosion during damascene processing










Image Number 6 for United States Patent #7405152.

A damascene process incorporating a GCIB step is provided. The GCIB step can replace one or more CMP steps in the traditional damascene process. The GCIB step allows for selectable removal of unwanted material and thus, reduces unwanted erosion of certain nearby structures during damascene process. A GCIB step may also be incorporated in the damascene process as a final polish step to clean up surfaces that have been planarized using a CMP step.








 
 
  Recently Added Patents
Digital X-ray detector arrangement and digital X-ray imaging method
Receiver and transmitter receiver system
Dynamically updating privacy settings in a social network
Proton conducting electrolytes with cross-linked copolymer additives for use in fuel cells
Cis-alkoxy-substituted spirocyclic 1-H-pyrrolidine-2,4-dione derivatives
Mask and method for forming the mask
Method and apparatus for encoding and decoding video based on first sub-pixel unit and second sub-pixel unit
  Randomly Featured Patents
Fuel cell for downhole and subsea power systems
Electrical submersible pumping system with gas separation and gas venting to surface in separate conduits
Method of treating heparin-induced thrombocytopenia
Gastrin releasing peptide-like peptides
Method and apparatus for winding a thread and a package formed thereby
Electrical circuit voltage and continuity testing device
Football with aerodynamic lace
Transferable protective cover layers
Radio pager holster
Frozen, nutritious pet food