Resources Contact Us Home
Reducing wire erosion during damascene processing

Image Number 6 for United States Patent #7405152.

A damascene process incorporating a GCIB step is provided. The GCIB step can replace one or more CMP steps in the traditional damascene process. The GCIB step allows for selectable removal of unwanted material and thus, reduces unwanted erosion of certain nearby structures during damascene process. A GCIB step may also be incorporated in the damascene process as a final polish step to clean up surfaces that have been planarized using a CMP step.

  Recently Added Patents
Method of inspecting wafer
Motion compensated overlay
System and method of verification of analog circuits
Method and apparatus for controlling a multi-node process
Over the counter medicinal container with surface ornamentation
System and method for broadcasting rich media to devices over multiple carriers
High performance actuator motor
  Randomly Featured Patents
Direct drive bearing mechanism
Methods and compositions for inhibiting binding of IgE to a high affinity receptor
Real-time system for monitoring theft protection
Identification and localization of radioisotopes
Radio signalling systems
Hydraulic controller for working machine
Electrical switching apparatus indicating status through panel aperture
Stacked indirect air heater with single path airflow
Hybrid vehicle and hybrid vehicle controlling method
Fiber-coupled, angled-dual-axis confocal scanning microscopes for imaging in a scattering medium