Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Reducing wire erosion during damascene processing










Image Number 6 for United States Patent #7405152.

A damascene process incorporating a GCIB step is provided. The GCIB step can replace one or more CMP steps in the traditional damascene process. The GCIB step allows for selectable removal of unwanted material and thus, reduces unwanted erosion of certain nearby structures during damascene process. A GCIB step may also be incorporated in the damascene process as a final polish step to clean up surfaces that have been planarized using a CMP step.








 
 
  Recently Added Patents
Campanula plant named `PKMM03`
Methods and systems for use in tracking targets for direction finding systems
Aqueous flowable concentrate compositions of a microencapsulated dinitroaniline herbicide
(4926
Modular utility rack
Digital rights management for media streams
Gemstone
  Randomly Featured Patents
Control apparatus for camera
Apparatus and method for low power routing of signals in a Low Voltage Differential Signaling system
Frame system and connectors for portable shelters
Cyclic aminophenylacetic acid derivatives, process for preparing the same and immune response modulator having the same as an effective ingredient
Grass collecting apparatus for rotary mower
Centering device for femoral implant and method and apparatus for implementation thereof
Collapsible umbrella
Method for removing initiators from grafting products
Acid-labile subunit (ALS) of insulin-like growth factor binding protein complex
Dynamically altering a pipeline controller mode based on resource availability