Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Reducing wire erosion during damascene processing










Image Number 6 for United States Patent #7405152.

A damascene process incorporating a GCIB step is provided. The GCIB step can replace one or more CMP steps in the traditional damascene process. The GCIB step allows for selectable removal of unwanted material and thus, reduces unwanted erosion of certain nearby structures during damascene process. A GCIB step may also be incorporated in the damascene process as a final polish step to clean up surfaces that have been planarized using a CMP step.








 
 
  Recently Added Patents
Method and apparatus for complementing an instrument panel by utilizing augmented reality
Image-monitoring method for electroporation treatment and as associated image-monitoring appliance
Aware manufacturing of integrated circuits
Method and system for establishing security connection between switch equipments
Phenethanolamine derivatives for treatment of respiratory diseases
Lentiviral gene transfer vectors and their medicinal applications
Agent for expelling parasites in humans, animals or birds
  Randomly Featured Patents
Method for internally jump starting an internal combustion engine for a land-based vehicle
PNNI topology abstraction
Rotary encoders
Device for feeding sheet material
Tricyanoborates
Support for dispensing packages
Fluid operated nozzles for generation of vibrations in liquids
Particle filter of metal foil and process for producing a particle filter
Beverage dispenser
Methods for preparing ruthenium and osmium compounds