Resources Contact Us Home
Reducing wire erosion during damascene processing

Image Number 6 for United States Patent #7405152.

A damascene process incorporating a GCIB step is provided. The GCIB step can replace one or more CMP steps in the traditional damascene process. The GCIB step allows for selectable removal of unwanted material and thus, reduces unwanted erosion of certain nearby structures during damascene process. A GCIB step may also be incorporated in the damascene process as a final polish step to clean up surfaces that have been planarized using a CMP step.

  Recently Added Patents
Method and computer system for automatic vectorization of a vessel tree
Method and apparatus for determining the altitude of a mobile device
Method and system for dynamic digital rights bundling
Mobile tablet information handling system support
Communication apparatus, and method and program for controlling same
Steering wheel
Method for manufacturing semiconductor element and semiconductor device, and deposition apparatus
  Randomly Featured Patents
Process for producing polydienes
Air bag module construction and assembly technique
Lamp unit for facsimile
Configurable wheel truck for skateboards or roller skates incorporating novel wheel designs
Apple tree named `Gemini`
Clothes washer and dry cleaner
Retiming circuits using a cut-based approach
Ethylene polymer compositions stabilized against water treeing and electrical treeing by an organo titanium chelate; and the use thereof as insulation about electrical conductors
Sterile fluid pump diaphragm construction
Method for manufacturing membrane electrode assembly