Resources Contact Us Home
Reducing wire erosion during damascene processing

Image Number 6 for United States Patent #7405152.

A damascene process incorporating a GCIB step is provided. The GCIB step can replace one or more CMP steps in the traditional damascene process. The GCIB step allows for selectable removal of unwanted material and thus, reduces unwanted erosion of certain nearby structures during damascene process. A GCIB step may also be incorporated in the damascene process as a final polish step to clean up surfaces that have been planarized using a CMP step.

  Recently Added Patents
Peer to peer (P2P) missing fields and field valuation feedback
Hair motion compositor system for use in a hair/fur pipeline
Compositions, organisms, systems, and methods for expressing a gene product in plants using SCBV expression control sequences operable in monocots and dicots
Device and method for processing input data of protective relay
Image correction method
High power insulated gate bipolar transistors
Cable preparation tool
  Randomly Featured Patents
Paper web feed unit used in a rotary press and equipped with a paper web traveling tension controller
Watch display stand
Wiper, grouting seal and diaphragm apparatus
Multi-transformer architecture for an active RF circuit
Process to prepare pyrimidine nucleosides
Electrode catalyst layer for use in fuel cell
Apparatus for precision machining crank pins of crankshafts
Injection quantity control unit and fuel injection system having the unit
Facsimile apparatus
Device and system which control a projector based on a digital multiplex protocol