Resources Contact Us Home
Reducing wire erosion during damascene processing

Image Number 6 for United States Patent #7405152.

A damascene process incorporating a GCIB step is provided. The GCIB step can replace one or more CMP steps in the traditional damascene process. The GCIB step allows for selectable removal of unwanted material and thus, reduces unwanted erosion of certain nearby structures during damascene process. A GCIB step may also be incorporated in the damascene process as a final polish step to clean up surfaces that have been planarized using a CMP step.

  Recently Added Patents
Dynamically reconfigurable systolic array accelorators
Scanning projection apparatus with tangential compensation
Integrated disk driving module including a stepping motor integrally formed with a base unit
Low power voltage controlled oscillator (VCO)
Voltage detector having voltage detection printed board
Compound semiconductor device and manufacturing method therefor
Measuring apparatus for measuring a physical property of a sample
  Randomly Featured Patents
Shaft lock device and portable information processing apparatus with shaft lock device
Control circuit and control method for dimming LED lighting circuit
Exit stator mounting
Access signal adjustment circuits and methods for memory cells in a cross-point array
Golf club head
Chondrocyte therapeutic delivery system
Digital high definition television video recorder with trick-play features
Printing control method and apparatus of a printing process with different working stages
Wood preservative
Measuring confidence of file clustering and clustering based file classification