Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Reducing wire erosion during damascene processing










Image Number 6 for United States Patent #7405152.

A damascene process incorporating a GCIB step is provided. The GCIB step can replace one or more CMP steps in the traditional damascene process. The GCIB step allows for selectable removal of unwanted material and thus, reduces unwanted erosion of certain nearby structures during damascene process. A GCIB step may also be incorporated in the damascene process as a final polish step to clean up surfaces that have been planarized using a CMP step.








 
 
  Recently Added Patents
Methods for the production of aligned carbon nanotubes and nanostructured material containing the same
Authorization method for location based services
Digital watermark embedding apparatus, digital watermark embedding method, and digital watermark detection apparatus
System and method for enabling image recognition and searching of remote content on display
Fused thiazole derivatives as kinase inhibitors
Plural component proportioner
Pharmaceutical compositions of paclitaxel, paclitaxel analogs or paclitaxel conjugates and related methods of preparation and use
  Randomly Featured Patents
Wafer cylinder having blockable wafer tumblers
Expression vectors comprising nucleic acids encoding SEBF proteins and uses thereof
Arrangements for converting rotary motion to linear motion
Autonomic method and apparatus for counting branch instructions to generate branch statistics meant to improve branch predictions
Catalytic material for treating pollutant-containing gases
Front body structure of automotive vehicle
Image processing method, image processing apparatus, storage medium, and program for calculating first and second graduation-correction characteristics, and for reducing hue variations of a se
Audio ear bud headphone with extended curvature
Injection laser and photosensor assembly
Rotary drill bit