Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method of manufacturing semiconductor device










Image Number 5 for United States Patent #7374978.

A mask is formed selectively on a crystalline silicon film containing a catalyst element, and an amorphous silicon film is formed so as to cover the mask. Phosphorus is implanted into the amorphous silicon film and the portion of the crystalline silicon film which is not covered with the mask. The silicon films are then heated by rapid thermal annealing (RTA). By virtue of the existence of the amorphous silicon film, the temperature of the crystalline silicon film is increased uniformly, whereby the portion of the crystalline silicon film covered with the mask is also heated sufficiently and the catalyst element existing in this region moves to the phosphorus-implanted, amorphous portion having high gettering ability. As a result, the concentration of the catalyst element is reduced in the portion of the silicon film covered with the mask. A semiconductor device is manufactured by using this portion.








 
 
  Recently Added Patents
Method of making a low-Rdson vertical power MOSFET device
Author signatures for legal purposes
Circuit board having semiconductor chip embedded therein
Method and apparatus for diagnosing faults in a hybrid internet protocol network
Image forming apparatus and system connectable with an authorization apparatus via a communications network, the image forming apparatus comprising an apparatus control section, an initial inq
Global codebook for coordinated multi-point processing
Hemostatic devices and methods of making same
  Randomly Featured Patents
Torque receiver controller
Efficiently exporting local device access onto a system area network using a direct-call interface
Method for assaying coagulation in fluid samples
Scooped boat hull having tri-keel surfaces
Dual-frame user interface on generic client software
Polluted water purification
Method and apparatus for growing next generation network using modular design
Roof-mounted air conditioning system with built-in compressor
Multi-layer core golf ball
Transmission rate control method, radio base station and radio network controller