Resources Contact Us Home
Method of manufacturing semiconductor device

Image Number 5 for United States Patent #7374978.

A mask is formed selectively on a crystalline silicon film containing a catalyst element, and an amorphous silicon film is formed so as to cover the mask. Phosphorus is implanted into the amorphous silicon film and the portion of the crystalline silicon film which is not covered with the mask. The silicon films are then heated by rapid thermal annealing (RTA). By virtue of the existence of the amorphous silicon film, the temperature of the crystalline silicon film is increased uniformly, whereby the portion of the crystalline silicon film covered with the mask is also heated sufficiently and the catalyst element existing in this region moves to the phosphorus-implanted, amorphous portion having high gettering ability. As a result, the concentration of the catalyst element is reduced in the portion of the silicon film covered with the mask. A semiconductor device is manufactured by using this portion.

  Recently Added Patents
Data communication system, data transmitting apparatus, data transmitting method, and method for determining packet size and redundancy
Pet urn enclosure
Temporal document trainer and method
Predicting popularity of electronic publications
Recording device, recording method, and program
Once daily formulations of tetracyclines
Inhibition of HRP-3 using modified oligonucleotides
  Randomly Featured Patents
Supersonic centrifugal compression and separation of liquid and gas mixture
Adjustable pitch propeller drive
Information recording medium reproducing method, information recording medium, reproducing apparatus and information medium managing method
Trim cover for use with seats in vehicles
Method and apparatus for adapting an electrostatic copier machine to a plain paper facsimile transceiver
Semiconductor laser element, manufacturing method thereof, optical disk apparatus and optical transmission system
Process for pulverizing coal using combination gas in fluid energy pulverizers
Extraction of coniferous woods with fluid carbon dioxide and other supercritical fluids
Telephone with display screen
Preparation of carboxylic acid esters