Resources Contact Us Home
Method of manufacturing semiconductor device

Image Number 5 for United States Patent #7374978.

A mask is formed selectively on a crystalline silicon film containing a catalyst element, and an amorphous silicon film is formed so as to cover the mask. Phosphorus is implanted into the amorphous silicon film and the portion of the crystalline silicon film which is not covered with the mask. The silicon films are then heated by rapid thermal annealing (RTA). By virtue of the existence of the amorphous silicon film, the temperature of the crystalline silicon film is increased uniformly, whereby the portion of the crystalline silicon film covered with the mask is also heated sufficiently and the catalyst element existing in this region moves to the phosphorus-implanted, amorphous portion having high gettering ability. As a result, the concentration of the catalyst element is reduced in the portion of the silicon film covered with the mask. A semiconductor device is manufactured by using this portion.

  Recently Added Patents
Silicon-carbonaceous encapsulated materials
Heater and image heating apparatus having the heater installed therein
Electron-jump chemical energy converter
Carboxylic acid containing dispersants for composites
Human relationships registering system and device for registering human relationships, program for registering human relationships, and medium storing human relationships registering program a
Method of requesting services of network devices, network devices capable of performing the method, and storage medium for storing the method
Process to make structured particles
  Randomly Featured Patents
Hot roll fuser
Indexing system and method for nearest neighbor searches in high dimensional data spaces
LCD tag for display shelf
Interface circuit for utilizing a facsimile machine coupled to a PC as a scanner or printer
System and method for automated transfer and evaluation of the quality of mass data of a technical process or a technical project
Marked foreign data blocks
Flocked transfer and article of manufacture including the application of the transfer by thermoplastic polymer film
Metal salts of N-hydroxyalkylated or N-aminoalkylated branched .alpha.-aminoacids
Object holding device
Deodorant porous polymer and a deodorant fibrous material using the same