Resources Contact Us Home
Microactuator with displacement sensing function and deformable mirror including the microactuator

Image Number 16 for United States Patent #7368846.

According to the present invention, a moving element Ai such as an electrostatically driven actuator is displaced by supplying a drive signal thereto. Meanwhile, a displacement sensing section 6 senses its displacement and a calibrating section 15 automatically calibrates the correlation between the drive signal and the displacement, thereby compensating for a variation in the characteristic of the actuator with time and according to the environment. A switching section 7 selectively connects the single displacement sensing section to a plurality of moving elements Ai one after another, thereby cutting down the circuit for displacement sensing.

  Recently Added Patents
Method and apparatus for controlling a multi-node process
Method and system for billing based on color component histograms
System and method for providing dynamic navigation through a property to a selected destination
Managing and collaborating with digital content
Scoring records for sorting by user-specific weights based on relative importance
Fuser member having composite outer layer
Process of preparing functionalized polymers via enzymatic catalysis
  Randomly Featured Patents
Multitubular heat exchanger
Lithographic apparatus, immersion projection apparatus and device manufacturing method
Window regulator mechanism
Dielectric ceramic composition and electronic device
Startup power supply for automobile
Crank assembly for a screen wiper drive of an automotive vehicle
Sputtering target
Programmable interconnect structures and programmable integrated circuits
Apparatus for measuring body fat
Semiconductor photodetector, method for manufacturing semiconductor photodetector and photodetector module