Resources Contact Us Home
Microactuator with displacement sensing function and deformable mirror including the microactuator

Image Number 16 for United States Patent #7368846.

According to the present invention, a moving element Ai such as an electrostatically driven actuator is displaced by supplying a drive signal thereto. Meanwhile, a displacement sensing section 6 senses its displacement and a calibrating section 15 automatically calibrates the correlation between the drive signal and the displacement, thereby compensating for a variation in the characteristic of the actuator with time and according to the environment. A switching section 7 selectively connects the single displacement sensing section to a plurality of moving elements Ai one after another, thereby cutting down the circuit for displacement sensing.

  Recently Added Patents
Motion compensated overlay
Switchable memory diodes based on ferroelectric/conjugated polymer heterostructures and/or their composites
Demand based power allocation
Methods of forming integrated circuit packages
Exposure apparatus, exposure method, and device manufacturing method
Capacitance sensing
Adjustable voltage regulator with dynamic voltage compensation
  Randomly Featured Patents
Optical apparatus and method for increasing intensity of multimode laser beams and a printer for printing lenticular images utilizing such laser beams
Apparatus for dental shade measurement
Memory card connector
Cryogenic connector
Method of forming solder film
Toilet lever
Friction lining
Joint for electrical cables
Double gate FET and fabrication process