Resources Contact Us Home
Microactuator with displacement sensing function and deformable mirror including the microactuator

Image Number 16 for United States Patent #7368846.

According to the present invention, a moving element Ai such as an electrostatically driven actuator is displaced by supplying a drive signal thereto. Meanwhile, a displacement sensing section 6 senses its displacement and a calibrating section 15 automatically calibrates the correlation between the drive signal and the displacement, thereby compensating for a variation in the characteristic of the actuator with time and according to the environment. A switching section 7 selectively connects the single displacement sensing section to a plurality of moving elements Ai one after another, thereby cutting down the circuit for displacement sensing.

  Recently Added Patents
Touchscreen with extended conductive pattern
Antimony and germanium complexes useful for CVD/ALD of metal thin films
Information repository search system
Launch cable case
Lifting apparatus
System and method for broadcasting rich media to devices over multiple carriers
Video conference
  Randomly Featured Patents
Reclaiming and utilizing discarded and newly formed coke breeze, coal fines, and blast furnace revert materials, and related methods
Apparatus for detecting a current and temperature for an integrated circuit
Plastic pallet
Treatment for improved magnesium surface corrosion-resistance
Heterocyclic compounds as inhibitors of 17beta-HSD3
Surface modification of polymer particles
Adjustable frame apparatus for telescopic spectacles
Holder for purse
Vibration-proof lens device