Resources Contact Us Home
Microactuator with displacement sensing function and deformable mirror including the microactuator

Image Number 16 for United States Patent #7368846.

According to the present invention, a moving element Ai such as an electrostatically driven actuator is displaced by supplying a drive signal thereto. Meanwhile, a displacement sensing section 6 senses its displacement and a calibrating section 15 automatically calibrates the correlation between the drive signal and the displacement, thereby compensating for a variation in the characteristic of the actuator with time and according to the environment. A switching section 7 selectively connects the single displacement sensing section to a plurality of moving elements Ai one after another, thereby cutting down the circuit for displacement sensing.

  Recently Added Patents
Methods and systems providing desktop search capability to software application
Surface acoustic wave resonator for down-hole applications
Soybean cultivar CL1013665
Information recording medium and information processing method for accessing content with license or copyright protection
System and method for calibrating display device using transfer functions
Beaconing and superframe structure for millimeter wave wireless technologies
Pattern generation method and pattern generation program
  Randomly Featured Patents
Pore-air pressure measurement device for use in high shock environments
Apparatus and method for expanding and controlling the multifunction mechaposition
Elliposometer, sample positioning mechanism, and polarization angular adjusting mechanism, used in the elliposometer
Stator cooling assembly
Quick connect coupling
Configurable dispersion compensation trimmer
Method of preventing the development of rheumatoid arthritis in subjects with undifferentiated arthritis
Durable atomic storage update manager
Optical network unit
Pill box