Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Carbon nanotube interconnects in porous diamond interlayer dielectrics










Image Number 5 for United States Patent #7365003.

A method and structure for using porous diamond interlayer dielectrics (ILDs) in conjunction with carbon nanotube interconnects is herein described. A diamond ILD is deposited on an underlaying layer. The diamond layer is optionally and selectively removed of non-sp3 bond to create a porous diamond film. Trenches and vias are etched in the porous diamond ILD. Carbon nanotubes are deposited on the diamond ILD filling the trenches using a liquid crystal host-carbon nanotube solution. Using methods of nematic liquid crystal alignment, the carbon nanotubes are aligned under the influence of the liquid crystals. At least some of the liquid crystal solution is removed leaving an aligned carbon nanotubes.








 
 
  Recently Added Patents
Method and control unit for rectifying a camera image
Method of detecting impurities in high temperature aqueous solution and apparatus of detecting impurities for the same
Methods and systems for automatically registering a mobile phone device with one or more media content access devices
Lateral diffusion metal oxide semiconductor transistor structure
Distributed job scheduling in a multi-nodal environment
Cleaning device, image formation device, and image formation method
Active matrix organic electroluminescence display and its gradation control method
  Randomly Featured Patents
Electrical contact material of Ag, SnO.sub.2, GeO.sub.2 and In.sub.2 O.sub. 3
Nut harvester
Scale control agents
Coin processing system
Variable band-pass filter circuit
Two-component seal for a washing machine spin tub
Detached plume abatement method
Sulfanimines as bleach catalysts
Method for assembling camera module
Memory system having servo compensation