Resources Contact Us Home
Carbon nanotube interconnects in porous diamond interlayer dielectrics

Image Number 5 for United States Patent #7365003.

A method and structure for using porous diamond interlayer dielectrics (ILDs) in conjunction with carbon nanotube interconnects is herein described. A diamond ILD is deposited on an underlaying layer. The diamond layer is optionally and selectively removed of non-sp3 bond to create a porous diamond film. Trenches and vias are etched in the porous diamond ILD. Carbon nanotubes are deposited on the diamond ILD filling the trenches using a liquid crystal host-carbon nanotube solution. Using methods of nematic liquid crystal alignment, the carbon nanotubes are aligned under the influence of the liquid crystals. At least some of the liquid crystal solution is removed leaving an aligned carbon nanotubes.

  Recently Added Patents
Methods and apparatus to provide haptic feedback
Rules-based approach to transferring and/or viewing medical images
Fabricated leaf tea products
UV liquid treatment system
Methods and systems for assessing sales activity of a merchant
Display system, display control method and computer program
Magnetic reading and writing device
  Randomly Featured Patents
Shaped polyethylene articles of intermediate molecular weight and high modulus
Guiding means at a joint
Systems and methods for forming metal oxides using metal compounds containing aminosilane ligands
Greeting card having a dog bone shaped blister pack
Pipe plugging device and method
Methods of screening for supracolonic neoplasms based on stool samples containing a nucleic acid marker indicative of a neoplasm
Fish pin bone remover
SSMA receiver with synchronous demodulation and variable gain control
System and method of compensating for injector variability
Optical card reader/writer