Resources Contact Us Home
Carbon nanotube interconnects in porous diamond interlayer dielectrics

Image Number 5 for United States Patent #7365003.

A method and structure for using porous diamond interlayer dielectrics (ILDs) in conjunction with carbon nanotube interconnects is herein described. A diamond ILD is deposited on an underlaying layer. The diamond layer is optionally and selectively removed of non-sp3 bond to create a porous diamond film. Trenches and vias are etched in the porous diamond ILD. Carbon nanotubes are deposited on the diamond ILD filling the trenches using a liquid crystal host-carbon nanotube solution. Using methods of nematic liquid crystal alignment, the carbon nanotubes are aligned under the influence of the liquid crystals. At least some of the liquid crystal solution is removed leaving an aligned carbon nanotubes.

  Recently Added Patents
Object tracking by hierarchical association of detection responses
Workability of an aqueous formulation with a hydraulic binder base using a combination of comb-branched polymers
Trick mode on bidirectional predictive frames
System, method, and apparatus for settlement for participation in an electric power grid
Software object lock management using observations
Method of parking double-bladed rotor of wind power plant
Touch panel and display device
  Randomly Featured Patents
Narrow bandwidth, pico-second, beta barium borate-master oscillator power amplifier system and method of operation of same
Drive clutch for a continuously variable transmission with engine braking and built in belt protection
Multi-dimensional data protection and mirroring method for micro level data
Display device for a wristwatch
Methods for wireless data transmission between a base station and one or more transponders
Synchronizing system for hydraulic four wheel steering
Apparatus and method for controlling oxygen concentration in the vicinity of a wound
Nanostructures and methods for manufacturing the same