Resources Contact Us Home
Carbon nanotube interconnects in porous diamond interlayer dielectrics

Image Number 5 for United States Patent #7365003.

A method and structure for using porous diamond interlayer dielectrics (ILDs) in conjunction with carbon nanotube interconnects is herein described. A diamond ILD is deposited on an underlaying layer. The diamond layer is optionally and selectively removed of non-sp3 bond to create a porous diamond film. Trenches and vias are etched in the porous diamond ILD. Carbon nanotubes are deposited on the diamond ILD filling the trenches using a liquid crystal host-carbon nanotube solution. Using methods of nematic liquid crystal alignment, the carbon nanotubes are aligned under the influence of the liquid crystals. At least some of the liquid crystal solution is removed leaving an aligned carbon nanotubes.

  Recently Added Patents
Wide bandwidth hybrid antenna for combination EAS and RFID label or tag
Playlist search device, playlist search method and program
Digital broadcast receiver and method for processing caption thereof
Epitaxial substrate for electronic device, in which current flows in lateral direction and method of producing the same
Method, system and program for securing redundancy in parallel computing system
Method for determining an object class of an object, from which light is emitted and/or reflected to a vehicle
Surveillance apparatus and method for wireless mesh network
  Randomly Featured Patents
Operating system for increasing the recovery of fluids from a deposit, simplifying production and processing installations, and facilitating operations with enhanced safety
Methods and apparatus for occlusion of body lumens
Paintball gun air reservoir
Horse blanket adjustment device
Polyimide foam prepared from amino terminated butadiene acrylonitrile reactant
Modular multiplex/demultiplex apparatus
Liquid crystal materials containing pleochroic anthraquinone dyes
Aeration valve
Device for scrubbing carpet
Aromatic amine substituted bridged nitrogen and sulfur donor atom ligands for imaging