Resources Contact Us Home
Carbon nanotube interconnects in porous diamond interlayer dielectrics

Image Number 5 for United States Patent #7365003.

A method and structure for using porous diamond interlayer dielectrics (ILDs) in conjunction with carbon nanotube interconnects is herein described. A diamond ILD is deposited on an underlaying layer. The diamond layer is optionally and selectively removed of non-sp3 bond to create a porous diamond film. Trenches and vias are etched in the porous diamond ILD. Carbon nanotubes are deposited on the diamond ILD filling the trenches using a liquid crystal host-carbon nanotube solution. Using methods of nematic liquid crystal alignment, the carbon nanotubes are aligned under the influence of the liquid crystals. At least some of the liquid crystal solution is removed leaving an aligned carbon nanotubes.

  Recently Added Patents
Generating a network map
Methods and apparatus for clock signal synchronization in a configuration of series connected semiconductor devices
Imaging apparatus, control method thereof, and program
Maintenance guidance display device, maintenance guidance display method, and maintenance guidance display program
Synchronization of communication equipment
Instantaneous single click perpetual date mechanism
Wireless communication system, wireless communication device, wireless communication method, and program
  Randomly Featured Patents
Container, substantially of cuboid form, for at least two articles
Safe removal of external device from computing device
Ink supply device
Movable handle for a power tool
Controlling the normal:ISO aldehyde ratio in a mixed ligand hydroformylation process by controlling the olefin partial pressure
Rear brace articulating stilt
Apparatus and method for characterizing gait
Nitroxyl compounds, and diagnostic media based thereon useful for enhancing NmR imaging
Rose plant named `POULac018`
Radial discharge actuator device