Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Carbon nanotube interconnects in porous diamond interlayer dielectrics










Image Number 5 for United States Patent #7365003.

A method and structure for using porous diamond interlayer dielectrics (ILDs) in conjunction with carbon nanotube interconnects is herein described. A diamond ILD is deposited on an underlaying layer. The diamond layer is optionally and selectively removed of non-sp3 bond to create a porous diamond film. Trenches and vias are etched in the porous diamond ILD. Carbon nanotubes are deposited on the diamond ILD filling the trenches using a liquid crystal host-carbon nanotube solution. Using methods of nematic liquid crystal alignment, the carbon nanotubes are aligned under the influence of the liquid crystals. At least some of the liquid crystal solution is removed leaving an aligned carbon nanotubes.








 
 
  Recently Added Patents
Heating pad
Device to control force required to depress accelerator pedal
Multi-port, gigabit SERDES transceiver capable of automatic fail switchover
Cross-platform cloud-based map creation
Adaptive take-off strips for smoothing ink consumption
Dose escalation enzyme replacement therapy for treating acid sphingomyelinase deficiency
Concentration measuring apparatus for hydrogen sulfide in gas flow, and method for determining sulfide ion
  Randomly Featured Patents
Method of descrambling a scrambled content data object
Methods of forming stacked semiconductor devices with single-crystal semiconductor regions
Method of laser marking a body of material having a thermal conductivity approximately equal to that of glass
Safety ski binding
Rotor with a cover plate for securing a magnet in the rotor
Method for setting the breakover voltage of a thyristor
Bernoulli wind prediction system
Adaptive iterative bone correction in computerized tomography
Die-height adjusting device of mechanical press
Shoe sole