Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Carbon nanotube interconnects in porous diamond interlayer dielectrics










Image Number 5 for United States Patent #7365003.

A method and structure for using porous diamond interlayer dielectrics (ILDs) in conjunction with carbon nanotube interconnects is herein described. A diamond ILD is deposited on an underlaying layer. The diamond layer is optionally and selectively removed of non-sp3 bond to create a porous diamond film. Trenches and vias are etched in the porous diamond ILD. Carbon nanotubes are deposited on the diamond ILD filling the trenches using a liquid crystal host-carbon nanotube solution. Using methods of nematic liquid crystal alignment, the carbon nanotubes are aligned under the influence of the liquid crystals. At least some of the liquid crystal solution is removed leaving an aligned carbon nanotubes.








 
 
  Recently Added Patents
Magnetic storage apparatus
MOS resistor apparatus and methods
Digital broadcasting system and method of processing data
Conductor for transmitting electrical power
Multi-port, gigabit SERDES transceiver capable of automatic fail switchover
Configurable caged ball insert for a downhole tool
Software self-checking systems and methods
  Randomly Featured Patents
Self-priming centrifugal pump
P-Phenoxy-alkylphenones and corresponding alcohols
Coronary sinus catheter
Fuse
Circle drafting template
Throttle control for small engines and other applications
Method for producing hydrogen
Image capturing apparatus and control method therefor
Phenyl substituted-2,4,6,8-nonatetraenoic acid
Fuel supply system for vehicle