Resources Contact Us Home
Method of fabricating recess channel array transistor

Image Number 7 for United States Patent #7361537.

A method of fabricating a recess channel array transistor is disclosed. An impurity region is formed in a semiconductor substrate. Then, a polysilicon layer is formed on the semiconductor substrate, both of which are then etched to form a trench that defines an active region. By filling the trench with an insulating material, a STI and an interlayer insulating layer are formed. A patterned mask layer is formed to be used for etching the polysilicon layer and the interlayer insulating layer, thereby forming an opening that defines a contact pad. A Spacer is formed along a sidewall of the contact pad. Using the mask layer and the spacer, the semiconductor substrate is etched to thereby form a recess channel trench. Thereafter, a gate insulating layer and a gate conductive layer are formed. A nitride layer is formed on the resultant structure, and chemical mechanical polishing is performed to isolate the nodes.

  Recently Added Patents
Dual use photovoltaic system
Data unit receiver and sender control method
Brushless electric motor or generator in shell construction
Inducement of organogenetic tolerance for pancreatic xenotransplant
Aqueous composition with agents to inhibit water evaporation
Methods and apparatus for performing multiple photoresist layer development and etching processes
Method and apparatus for selective decoding in a wireless communication system
  Randomly Featured Patents
Automatic visual inspection system
Substituted phenylethylene precursor deposition method
Dynamoelectric claw-shaped rotor with magnet retainer
Polymerizing monomers in presence of polyol and castor oil-polyol product
Apparatus for applying a fluid to a moving web of material
Trifluorovinyl aromatic containing poly(alkyl ether) prepolymers
Integrated circuit with silicon contact to silicide
Image pickup apparatus capable of recording object information
Laser light source, image display apparatus, and processing apparatus
Seed drill