Resources Contact Us Home
Method of fabricating recess channel array transistor

Image Number 2 for United States Patent #7361537.

A method of fabricating a recess channel array transistor is disclosed. An impurity region is formed in a semiconductor substrate. Then, a polysilicon layer is formed on the semiconductor substrate, both of which are then etched to form a trench that defines an active region. By filling the trench with an insulating material, a STI and an interlayer insulating layer are formed. A patterned mask layer is formed to be used for etching the polysilicon layer and the interlayer insulating layer, thereby forming an opening that defines a contact pad. A Spacer is formed along a sidewall of the contact pad. Using the mask layer and the spacer, the semiconductor substrate is etched to thereby form a recess channel trench. Thereafter, a gate insulating layer and a gate conductive layer are formed. A nitride layer is formed on the resultant structure, and chemical mechanical polishing is performed to isolate the nodes.

  Recently Added Patents
Selective high frequency spinal cord modulation for inhibiting pain with reduced side effects, and associated systems and methods
Server providing pseudo print preview and final regular preview to device
Detection of bioagents using a shear horizontal surface acoustic wave biosensor
Apparatus, electronic component and method for generating reference voltage
Devices, systems, and methods for tactile feedback and input
Commissioning incoming packet switched connections
Electronic device
  Randomly Featured Patents
Apparatus for controlling thickness of coated film on web-like member by roll coater
Ultralight coaxial rotor aircraft
Method for improving the fuel efficiency of a gas turbine engine
Method of manufacturing electrical cable
Method of implanting intraocular and intraorbital implantable devices for the controlled release of pharmacological agents
Anti-friction Tee-nut with deflected edges
Automatic system for suppressing the ground noise of apparatus for measuring the knocking
Structure for terminal section of motor
Collet chuck for splined workpieces