Resources Contact Us Home
Electron beam inspection system and inspection method and method of manufacturing devices using the system

Image Number 10 for United States Patent #7351969.

An electron beam inspection system of the image projection type includes a primary electron optical system for shaping an electron beam emitted from an electron gun into a rectangular configuration and applying the shaped electron beam to a sample surface to be inspected. A secondary electron optical system converges secondary electrons emitted from the sample. A detector converts the converged secondary electrons into an optical image through a fluorescent screen and focuses the image to a line sensor. A controller controls the charge transfer time of the line sensor at which the picked-up line image is transferred between each pair of adjacent pixel rows provided in the line sensor in association with the moving speed of a stage for moving the sample.

  Recently Added Patents
Negative electrode material for non-aqueous electrolyte secondary battery, method for manufacturing negative electrode material for non-aqueous electrolyte secondary battery, non-aqueous elect
Methods and systems to accomplish variable width data input
File management apparatus and file management apparatus controlling method
Artifact removal in nuclear images
Pyridylphenyl compounds for inflammation and immune-related uses
Signal transfer apparatus
  Randomly Featured Patents
Electronic game housing
Methods of making pyrrolidones
Apparatus for communicating with a RFID tag and cartridge for including at least a RFID tag
Integrated optical dual dispersion compensator for compensating both chromatic and polarization mode dispersion
Digital gate computer bus
Polycrystalline semiconductor thin film for semiconductor TFT on a substrate having a mobility in a longitudinal direction greater than in a width direction
Monitor for gas piping system
Method and apparatus for making a subminiature fuse
Tennis ball target
Composition for combatting skin blemishes and/or ageing of the skin, and uses thereof