Resources Contact Us Home
Semiconductor memory device and fabrication thereof

Image Number 3 for United States Patent #7332390.

A semiconductor memory device and fabrication method thereof. In a semiconductor memory device, each memory cell comprises a deep trench and a capacitor disposed on the lower portion thereof. A collar oxide layer having a first second sidewalls is disposed on the deep trench. The top of the first sidewall is at the same height as the surface of the semiconductor substrate. The top of the second sidewall is substantially equal to the top of the capacitor. The memory cell further comprises a buried conductor layer disposed on the second sidewall and the capacitor and a buried strap adjoining the buried conductive layer, and a transistor disposed on the surface of the semiconductor substrate and electrically connected to the capacitor through the buried strap and the buried conductive layer.

  Recently Added Patents
Glycoside compounds and pharmaceutical compositions thereof
Metal oxide semiconductor field effect transistor (MOSFET) gate termination
Digital broadcast transmission and receiving system having an improved receiving performance and signal processing method thereof
Computer-readable storage medium, image recognition apparatus, image recognition system, and image recognition method
Preparation of (R,R)-fenoterol and (R,R)-or (R,S)-fenoterol analogues and their use in treating congestive heart failure
Compact single-aperture antenna and direction-finding navigation system
Organic electroluminescent element, display and illuminator
  Randomly Featured Patents
Heat processing apparatus
Apparatus and method for periodically cleaning a charcoal canister and for periodically checking leak-tightness of a fuel system of an internal combustion engine
Brushless DC drive motor for signal recording means
Semiconductor integrated circuit
Board game case
Lithium secondary battery
Marine riser
Laser scanning microscope for fluorescence testing
Sewing machine with means for feeding a workpiece in two directions
Nuclear magnetic resonance assembly of chemical entities using advanced antenna probes