Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for forming damascene structure utilizing planarizing material coupled with compressive diffusion barrier material










Image Number 6 for United States Patent #7326651.

This invention relates to the manufacture of dual damascene interconnect structures in integrated circuit devices. Specifically, a method is disclosed for forming a single or dual damascene structure in a low-k dielectric thin film utilizing a planarizing material and a compressive diffusion barrier material. The barrier material preferably has a compressive stress of greater than 300 MPa. In a preferred dual damascene embodiment of this method, the vias are formed first in the dielectric material, then the planarizing material is deposited in the vias and on the dielectric material, and the barrier material is deposited on the planarizing material. The trenches are then formed lithographically in the imaging material, etched through the barrier material into the planarizing material, and the trench pattern is transferred to the dielectric material. During and following the course of these etch steps, the imaging, barrier and planarizing materials are removed. The resultant dual damascene structure may then be metallized. With this method, the problem of photoresist poisoning by the interlevel dielectric material is alleviated.








 
 
  Recently Added Patents
Image forming apparatus assembled with a fixing member and a pressing member
Emergent information database management system
Stable pharmaceutical composition and methods of using same
Radio communication system, base station apparatus, terminal apparatus, and radio communication method for radio communication system
Compression molding method and reinforced thermoplastic parts molded thereby
LED lighting module
Method and apparatus for focusing electrical stimulation in the brain during electro-convulsive therapy
  Randomly Featured Patents
Ventilation grille
Parity-scanning and refresh in dynamic memory devices
Rake receiver with individual finger compensator(s)
Cutlery detector and alarm
Catalyst regeneration apparatus
Wireless terminal device
Actuator
Switched capacitor voltage converters
Method and apparatus for converting wave motion into an alternative energy source
Two component etching