Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for forming damascene structure utilizing planarizing material coupled with compressive diffusion barrier material










Image Number 6 for United States Patent #7326651.

This invention relates to the manufacture of dual damascene interconnect structures in integrated circuit devices. Specifically, a method is disclosed for forming a single or dual damascene structure in a low-k dielectric thin film utilizing a planarizing material and a compressive diffusion barrier material. The barrier material preferably has a compressive stress of greater than 300 MPa. In a preferred dual damascene embodiment of this method, the vias are formed first in the dielectric material, then the planarizing material is deposited in the vias and on the dielectric material, and the barrier material is deposited on the planarizing material. The trenches are then formed lithographically in the imaging material, etched through the barrier material into the planarizing material, and the trench pattern is transferred to the dielectric material. During and following the course of these etch steps, the imaging, barrier and planarizing materials are removed. The resultant dual damascene structure may then be metallized. With this method, the problem of photoresist poisoning by the interlevel dielectric material is alleviated.








 
 
  Recently Added Patents
Collaborative image capture
Push-up bar
Filtering method for improving the data quality of geometric tire measurements
Method and system for evaluating/analyzing patent portfolio using patent priority approach
High electron mobility transistor and manufacturing method thereof
Organic semiconductor compound, semiconductor device, solar cell and producing method of organic semiconductor compound
Semiconductor devices having through electrodes and methods of fabricating the same
  Randomly Featured Patents
Stable aqueous solutions of pralidoxime salts
System and method of ion beam control in response to a beam glitch
Muscle function assessment apparatus and method
Information control in federated interaction
Control of dispersion of gun systems
Compositions and methods using the borreliacidal epitope(s) of borrelia burgdorferi outer surface protein C (OspC) for the diagnosis and prevention of lyme disease
Towing device
Homogeneous specific binding assay with carrier matrix incorporating specific binding partner
Layout technique for matched resistors on an integrated circuit substrate
Wafer scale processing