Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for forming damascene structure utilizing planarizing material coupled with compressive diffusion barrier material










Image Number 6 for United States Patent #7326651.

This invention relates to the manufacture of dual damascene interconnect structures in integrated circuit devices. Specifically, a method is disclosed for forming a single or dual damascene structure in a low-k dielectric thin film utilizing a planarizing material and a compressive diffusion barrier material. The barrier material preferably has a compressive stress of greater than 300 MPa. In a preferred dual damascene embodiment of this method, the vias are formed first in the dielectric material, then the planarizing material is deposited in the vias and on the dielectric material, and the barrier material is deposited on the planarizing material. The trenches are then formed lithographically in the imaging material, etched through the barrier material into the planarizing material, and the trench pattern is transferred to the dielectric material. During and following the course of these etch steps, the imaging, barrier and planarizing materials are removed. The resultant dual damascene structure may then be metallized. With this method, the problem of photoresist poisoning by the interlevel dielectric material is alleviated.








 
 
  Recently Added Patents
Automatic actuator for breakers or switches
Collaborative system for capture and reuse of software application knowledge and a method of realizing same
EpCAM as a reprogramming factor for non-pluripotent cells
Binary-to-gray converting circuits and gray code counter including the same
Systems and methods for providing a video playlist
Printed circuit board including electromagnetic bandgap structure
Method and system for the assignment of security group information using a proxy
  Randomly Featured Patents
Voltage comparator circuit with symmetric circuit topology
Missile having reduced mass guidance system
Electrolytic gold plating method and apparatus therefor
Image forming apparatus and image forming unit
Vehicle tire
Generation of stable linear plasmas
Aluminum alloy lead-frame and its use in fabrication of power semiconductor package
Video and audio information processing
Collimator with an adjustable focal length
Venetian blind