Resources Contact Us Home
System and methods for classifying anomalies of sample surfaces

Image Number 10 for United States Patent #7315365.

Two or more defect maps may be provided for the same sample surface at different detection sensitivities and/or processing thresholds. The defect maps may then be compared for better characterization of the anomalies as scratches, area anomalies or point anomalies. This can be done without concealing the more significant and larger size defects amongst numerous small and immaterial defects. One or more defect maps can be used to report the anomalies with classified information; the results from this map(s) can be used to monitor the process conditions to obtain better yield.

  Recently Added Patents
Label printer
Method of transmitting data using spatial multiplexing
Charged particle cancer therapy beam path control method and apparatus
Mobile terminal including stellar body watching hookup communications function
Method and system for scaling usage of a social based application on an online social network
Steering lock driving circuit and steering lock device
Enediyne compounds, conjugates thereof, and uses and methods therefor
  Randomly Featured Patents
Methods and structures for protecting reticles from electrostatic damage
Sliding friction bearings
Method and apparatus for fabricating honeycomb insulating material
Mobile terminal and multimedia message processing method thereof
Nerve cell death inhibitor
Simethicone solid oral dosage form
Microscope for reflected-light and transmitted-light microscopy
Fuel supply system
Air conditioner control method and apparatus of the same
Water-based adhesive