Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method and system for thin film characterization










Image Number 6 for United States Patent #7289234.

A method and system are presented for optical measurements in multi-layer structures to determine the properties of at least some of the layers. The structure is patterned by removing layer materials within a measurement site of the structure from the top layer to the lowermost layer of interests. Optical measurements are sequentially applied to the layers, by illuminating a measurement area in the layer under measurements, when the layer material above said layer under measurements is removed, thereby obtaining measured data portions for the at least some of the layers, respectively. The properties of each of the at least some layers are calculated, by analyzing the measured data portion of the lowermost layer, and then sequentially interpreting the measured data portions of all the other layers towards the uppermost layer, while utilizing for each layer the calculation results of the one or more underlying layers.








 
 
  Recently Added Patents
Warm air generating apparatus, sheet feeding apparatus, and image forming apparatus including warm air generating apparatus and sheet feeding apparatus
Event handling in an integrated execution environment
Optical imaging device and imaging method for microscopy
Method and system for generating and displaying an interactive dynamic graph view of multiply connected objects
Methods for determining decoding order in a MIMO system with successive interference cancellation
Dot templates for object detection in images
Use of Lactobacillus for liver protection
  Randomly Featured Patents
Quick circuit board press-mount device
Plasticized polyvinyl butyral interlayers
Thermoelectric conversion material and method of producing the same
Press for forming an article of composite material comprising reinforcing fibers in a polymer matrix
Network synchronization technique
Non-intrusive eye monitor system
Method of making nanostructured materials
Latching detector circuit
Flexible eyewear frame with rigid lens retainer
Copolymers of hydroxymethylbenzoic acid and lactam