Resources Contact Us Home
Method and system for thin film characterization

Image Number 6 for United States Patent #7289234.

A method and system are presented for optical measurements in multi-layer structures to determine the properties of at least some of the layers. The structure is patterned by removing layer materials within a measurement site of the structure from the top layer to the lowermost layer of interests. Optical measurements are sequentially applied to the layers, by illuminating a measurement area in the layer under measurements, when the layer material above said layer under measurements is removed, thereby obtaining measured data portions for the at least some of the layers, respectively. The properties of each of the at least some layers are calculated, by analyzing the measured data portion of the lowermost layer, and then sequentially interpreting the measured data portions of all the other layers towards the uppermost layer, while utilizing for each layer the calculation results of the one or more underlying layers.

  Recently Added Patents
Method for specifying control curve parameters for controlling climatic environmental conditions of climate-controlled enclosed spaces
System and method for redirected firewall discovery in a network environment
Organic light-emitting display with black matrix
Dual work function recessed access device and methods of forming
Tablet computer
Method of purifying crude acetone stream
Touch screen guitar
  Randomly Featured Patents
Knee joint for prosthesis
Bone fixation device, tools and methods
Slide fastener
Method for detecting a protease
15-Deoxy-16-hydroxy-16-allenyl prostane derivatives of the E and F series
Skimmer seal
Automatic weight selector
Apparatus and computer-readable media for determining whether an existing map specifies a different content type than the content type that is specified for the specified resource name extensi
High availability DC power supply with isolated inputs, diode-or-connected outputs, and power factor correction
Disposable, foldable scoop for dog waste