Resources Contact Us Home
Method and system for thin film characterization

Image Number 6 for United States Patent #7289234.

A method and system are presented for optical measurements in multi-layer structures to determine the properties of at least some of the layers. The structure is patterned by removing layer materials within a measurement site of the structure from the top layer to the lowermost layer of interests. Optical measurements are sequentially applied to the layers, by illuminating a measurement area in the layer under measurements, when the layer material above said layer under measurements is removed, thereby obtaining measured data portions for the at least some of the layers, respectively. The properties of each of the at least some layers are calculated, by analyzing the measured data portion of the lowermost layer, and then sequentially interpreting the measured data portions of all the other layers towards the uppermost layer, while utilizing for each layer the calculation results of the one or more underlying layers.

  Recently Added Patents
Advertising apparatus
Medicament container
Architectural panel with bamboo rings light density embossed surface
System and method for managing a loyalty program via an association network infrastructure
Customizing a range of acceptable tape dimensional stability write conditions
Tube lighting fixture
  Randomly Featured Patents
Simulator utilizing a non-spherical projection surface
Absorption refrigeration system with booster compressor and extraction of a partial vapor flow at an intermediate pressure
Mechanical casing for a USB or firewire port data storage device
Element for a toy building set
Apparatus for and a method of managing animals
Deep sleep mode for mesh points
System and method for providing an awareness of remote people in the room during a videoconference
Process for fabricating hollow races or wheels provided at their lateral ends with axle stumps in which process substantially no chips are produced; and races and wheels manufactured in accord
Integrated circuit burn-in test system and associated methods