Resources Contact Us Home
Method and system for thin film characterization

Image Number 6 for United States Patent #7289234.

A method and system are presented for optical measurements in multi-layer structures to determine the properties of at least some of the layers. The structure is patterned by removing layer materials within a measurement site of the structure from the top layer to the lowermost layer of interests. Optical measurements are sequentially applied to the layers, by illuminating a measurement area in the layer under measurements, when the layer material above said layer under measurements is removed, thereby obtaining measured data portions for the at least some of the layers, respectively. The properties of each of the at least some layers are calculated, by analyzing the measured data portion of the lowermost layer, and then sequentially interpreting the measured data portions of all the other layers towards the uppermost layer, while utilizing for each layer the calculation results of the one or more underlying layers.

  Recently Added Patents
Communication system, authentication device, control server, communication method, and program
Image pickup device with a plurality of pixels and an AD conversion circuit
Analysis device and an analysis apparatus using the analysis device
Faucet handle
Non-transitory computer readable recording medium storing print management program, print management device, print management method, and print system
Pressure-applying member, fixing device, and image forming apparatus
Nano-pigment inkjet ink composition that has a low odor and is environmentally-friendly
  Randomly Featured Patents
Vertical conveyor
Novel imidazobenzoxazines
Electrical connector
Combating fungi with novel azolyl-tetrahydrofuran-2-ylidene-methanes
Insert for locking portable dance floor sections
Fireplace-barbecue with heat exchanger
Coherent quantum information transfer between conventional qubits
MIMO self-expandable antenna structure
Method and apparatus for merging voice and data features with internet protocol television
Dynamic stabilization assembly with frusto-conical connection