Resources Contact Us Home
Method and system for e-beam scanning

Image Number 16 for United States Patent #7276690.

The disclosure relates to a method and system of electron beam scanning for measurement, inspection or review. In accordance with one embodiment, the method includes a first scan on a region to collect first image data. The first image data is processed to determine information about a feature in the region. A scanning method is selected for imaging the feature. A second scan using the selected scanning method on the feature is then applied to collect second image data.

  Recently Added Patents
Intralevel conductive light shield
Bid optimization in search engine marketing
Lighting elements
Glass or glass-ceramic pane reflecting infrared radiation
Case for camera
Active constant power supply apparatus
Stable nanoemulsions for ultrasound-mediated drug delivery and imaging
  Randomly Featured Patents
WT1 monoclonal antibodies
Operating knob for portable electronic computer
DDD type cardiac pacemaker having automatic operating mode switching
Apparatus for opening and closing door
Torque motor
Combustor liner segment seal member
Resist, method of forming a resist pattern and manufacturing an electronic parts using the resist
Drawer type receiving device of a refrigerator
Support mechanism
Substrate processing system, system inspecting method, system inspecting program and recording medium storing the program recorded therein