Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method of fabricating isolated semiconductor devices in epi-less substrate










Image Number 13 for United States Patent #7276431.

An structure for electrically isolating a semiconductor device is formed by implanting dopant into a semiconductor substrate that does not include an epitaxial layer. Following the implant the structure is exposed to a very limited thermal budget so that dopant does not diffuse significantly. As a result, the dimensions of the isolation structure are limited and defined, thereby allowing a higher packing density than obtainable using conventional processes which include the growth of an epitaxial layer and diffusion of the dopants. In one group of embodiments, the isolation structure includes a deep layer and a sidewall which together form a cup-shaped structure surrounding an enclosed region in which the isolated semiconductor device may be formed. The sidewalls may be formed by a series of pulsed implants at different energies, thereby creating a stack of overlapping implanted regions.








 
 
  Recently Added Patents
Inflatable workshop
Headset systems and methods
Dual-box location aware and dual-bitmap voltage domain aware on-chip variation techniques
Victim port-based design for test area overhead reduction in multiport latch-based memories
Method for manufacturing non-volatile memory device, non-volatile memory element, and non-volatile memory device
Extension of physical downlink control channel coverage
Stackable clothes drying apparatus
  Randomly Featured Patents
External combustion closed regenerative cycle piston engine
Fly eye lens
Camera
Display device and image processing method thereof
Method and apparatus for controlling an occupant side restraining device with enhanced side safing function
Collapsible weighing scale
Prone and laterally angled surgical device and method
Satellite communications systems and methods using radiotelephone
Cascaded power plant process and method for providing reversibly usable hydrogen carriers in such a power plant process
Image forming apparatus with control for varying conveying speed between a registration section and a decelerating position