Resources Contact Us Home
Scanning plasma reactor

Image Number 5 for United States Patent #7270724.

A scanning plasma reactor for exciting reactant gases at a substrate surface including a beam forming module, a gas injection module, a reaction chamber with a window and a vacuum chuck, a gas exhaust module. Radiation from the beam forming module and the reactant gas create an excited plasma zone. The excited plasma zone is translated across the substrate like a windshield wiper blade, or the substrate is conveyed under a fixed gas reaction zone.

  Recently Added Patents
Process for the enzymatic reduction of enoates
Systems and methods for velocity profile based approach to point control
Apparatus and method for sterilizing vessel with electron beam
Interface circuit and interface system
Telephone line seizure module
Apparatus with a local timing circuit that generates a multi-phase timing signal for a digital signal processing circuit
  Randomly Featured Patents
Holder for free-cutting machining tool inserts
S-triazine herbicidal antidotes
Process for manufacture of chiral succinic acid derivatives
Monitoring traffic in a mobile communication network
Beverage container holder with alternate supports
Catoptric lens arrangement
Side airbag
Component attachment apparatus
Catheter assembly including foldable internal bolster
Chemically amplified resist