Resources Contact Us Home
Scanning plasma reactor

Image Number 5 for United States Patent #7270724.

A scanning plasma reactor for exciting reactant gases at a substrate surface including a beam forming module, a gas injection module, a reaction chamber with a window and a vacuum chuck, a gas exhaust module. Radiation from the beam forming module and the reactant gas create an excited plasma zone. The excited plasma zone is translated across the substrate like a windshield wiper blade, or the substrate is conveyed under a fixed gas reaction zone.

  Recently Added Patents
Method and assembly for determining the temperature of a test sensor
Fractal method for detecting and filling data gaps within LiDAR data
Apparatus and method for discharging capacitor of input filter of power supply, and power supply including the apparatus
Image output method and device, and image display
Catalytic pyrolysis using UZM-44 aluminosilicate zeolite
Device for transmitting data between a serial data bus and working modules such as actuator modules and/or I/O modules
Wire catalyst for hydrogenation/dehydrogenation reaction and manufacturing method therefor
  Randomly Featured Patents
Organometallic complex and organic electroluminescent devices utilizing the same
Data gateway and method for conveying data to a base site in a communication system
Console redirection system for remotely controlling operation of devices on a host computer if data packet has been received during a time interval
Method and device for the deflection of a beam
Modular hip prosthesis
Fuselage structure for an aircraft fuselage in composite material and aircraft equipped with such a fuselage structure
Process for preparing pieces composed of solid electrolyte based on stabilized zircon and to pieces obtained by this process
Method of producing noble metal-supported powder, noble metal-supported powder and exhaust gas purifying catalyst
Process for effecting aldose to ketose conversion
Storage container cover