Resources Contact Us Home
Scanning plasma reactor

Image Number 5 for United States Patent #7270724.

A scanning plasma reactor for exciting reactant gases at a substrate surface including a beam forming module, a gas injection module, a reaction chamber with a window and a vacuum chuck, a gas exhaust module. Radiation from the beam forming module and the reactant gas create an excited plasma zone. The excited plasma zone is translated across the substrate like a windshield wiper blade, or the substrate is conveyed under a fixed gas reaction zone.

  Recently Added Patents
Tropoelastin derivatives
Method of operating an electromechanical converter, a controller and a computer program product
Distylium plant named `PIIDIST-II`
Harmonic sensor
Faucet handle
Transfer device and image forming apparatus including regulation member
Method and system of channel detecting and reporting, terminal, and management center
  Randomly Featured Patents
Slurry composition for chemical-mechanical polishing capable of compensating nanotopography effect and method for planarizing surface of semiconductor device using the same
Diaphragm-type flow control valve and manual control valve apparatus
Foaming device
Method and apparatus for robust information coding
Image forming apparatus and method of controlling fax thereof
Pyrrolizioines and synthesis thereof
Method of manufacturing a magnetic recording medium
Detector apparatus for detecting wind velocity and direction and ice accumulation
Compact fluorescent lamp adapter
Protective headgear