Resources Contact Us Home
Scanning plasma reactor

Image Number 5 for United States Patent #7270724.

A scanning plasma reactor for exciting reactant gases at a substrate surface including a beam forming module, a gas injection module, a reaction chamber with a window and a vacuum chuck, a gas exhaust module. Radiation from the beam forming module and the reactant gas create an excited plasma zone. The excited plasma zone is translated across the substrate like a windshield wiper blade, or the substrate is conveyed under a fixed gas reaction zone.

  Recently Added Patents
Maltol ether processes and intermediates
Storage basket with lid
Bicycle shifting method
Method for configuring analog-to-digital converter keys and non-transitory machine readable medium storing program code executed for performing such method
User control of replacement television advertisements inserted by a smart television
Shot scent dispenser
  Randomly Featured Patents
Perovskite semiconductor thin film and method of making thereof
Book nipping apparatus
Globally routable user agent uniform resource identifier system and method
Circuit breaker remote racking device
Two-way authentication using a combined code
Linear vibrator with an increased driving force
Device and method for restricting gas flow
Correction of power variations in laser sources
Strengthened public key protocol
Wildcards in radix- search tree structures