Resources Contact Us Home
Scanning plasma reactor

Image Number 5 for United States Patent #7270724.

A scanning plasma reactor for exciting reactant gases at a substrate surface including a beam forming module, a gas injection module, a reaction chamber with a window and a vacuum chuck, a gas exhaust module. Radiation from the beam forming module and the reactant gas create an excited plasma zone. The excited plasma zone is translated across the substrate like a windshield wiper blade, or the substrate is conveyed under a fixed gas reaction zone.

  Recently Added Patents
Register files for a digital signal processor operating in an interleaved multi-threaded environment
Cabinet door with tread pattern
Tablet computer
Optical interconnect in high-speed memory systems
Shape based similarity of continuous wave doppler images
Methods, systems, and computer-readable media for providing an event alert
Managing job execution
  Randomly Featured Patents
Air-tite compact fluorescent lamp plate
Speech-to-text processing based on a time-ordered classification of audio file segments
Gardener's hand cultivator
Vacuum actuated tubular blood pumping device with active values and application of the same
Key holder
Integrated microelectronic device with through-vias
Heat treatment apparatus for solution annealing aluminum alloy components
Door overlay
Storage system and configuration-change method thereof
Network device and control method thereof and network system