Resources Contact Us Home
Scanning plasma reactor

Image Number 12 for United States Patent #7270724.

A scanning plasma reactor for exciting reactant gases at a substrate surface including a beam forming module, a gas injection module, a reaction chamber with a window and a vacuum chuck, a gas exhaust module. Radiation from the beam forming module and the reactant gas create an excited plasma zone. The excited plasma zone is translated across the substrate like a windshield wiper blade, or the substrate is conveyed under a fixed gas reaction zone.

  Recently Added Patents
Electrode structure and its manufacturing method, and semiconductor module
Authenticating messages sent between a vehicle and a central facility
Flexible pouch
Organic electroluminescent element
Humidity indicator and method for fabricating the same
Semiconductor apparatus
Method and apparatus for using virtual machine technology for managing parallel communicating applications
  Randomly Featured Patents
Control apparatus and optical disk apparatus
High current coulometric KF titrator
Rotatable electric cable connecting system
Use of a cleaning process, a cleaning process, a connection process and a workpiece pair
Mowing machine
Digital audio player
Color electroluminescence display device
Pouch for a painter's belt
Liquid crystal display device having more uniform seal heights and its fabricating method
Sample handling system