Resources Contact Us Home
Scanning plasma reactor

Image Number 12 for United States Patent #7270724.

A scanning plasma reactor for exciting reactant gases at a substrate surface including a beam forming module, a gas injection module, a reaction chamber with a window and a vacuum chuck, a gas exhaust module. Radiation from the beam forming module and the reactant gas create an excited plasma zone. The excited plasma zone is translated across the substrate like a windshield wiper blade, or the substrate is conveyed under a fixed gas reaction zone.

  Recently Added Patents
Vehicle front fender
Systems and methods for unchoked control of gas turbine fuel gas control valves
Reduced sorbent utilization for circulating dry scrubbers
Method of synchronization for low power idle
Laser protection polymeric materials
Catalyst compositions for hydroformylation reaction and hydroformylation process using the same
Housing for gas flow indicator
  Randomly Featured Patents
Antithrombotic agents
High pressure radial flow valve
Methods and kits for synthesis of siRNA expression cassettes
Esters of hyaluronic acid with rhein, process for their preparation and compositions comprising the same
Video encoding/decoding method and apparatus for motion compensation prediction
Photochromatic and thermochromatic spiro-oxazepin-oxazine compounds and the process for their preparation
Non-volatile, static random access memory with store disturb immunity
Protector housing for squeezable valve
Fault interrupter with interchangeable line load connections
Automatic information center or the like