Resources Contact Us Home
Scanning plasma reactor

Image Number 12 for United States Patent #7270724.

A scanning plasma reactor for exciting reactant gases at a substrate surface including a beam forming module, a gas injection module, a reaction chamber with a window and a vacuum chuck, a gas exhaust module. Radiation from the beam forming module and the reactant gas create an excited plasma zone. The excited plasma zone is translated across the substrate like a windshield wiper blade, or the substrate is conveyed under a fixed gas reaction zone.

  Recently Added Patents
Nonvolatile semiconductor storage device having conductive and insulative charge storage films
Compression molding method and reinforced thermoplastic parts molded thereby
Wind driven generator for vehicles
System and method for efficient association of a power outlet and device
Health monitoring of applications in a guest partition
Information terminal, setting information distribution server, right information distribution server, network connection setting program and method
Catheter with multiple electrode assemblies for use at or near tubular regions of the heart
  Randomly Featured Patents
Dual-textured food substrate having large seasoning bits
Liquid beverage dispenser
Golf club head cover
Process for the production of gramine derivatives
Edge card connector with alignment member
Method of oral delivery with an adherent controlled-release salt sensitive capsule
Tired tread
Printer cartridge kit and method
Low-cost, no-fragment explosive access tool
Method for creating global distributed namespace