Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Salicide process










Image Number 3 for United States Patent #7238611.

A salicide process is provided. A metal layer selected from a group consisting of titanium, cobalt, platinum, palladium and an alloy thereof is formed over a silicon layer. A first thermal process is performed. Next, a second thermal process is performed, wherein the second thermal process includes a first step performed at 600.about.700 degrees centigrade for 10.about.60 seconds and a second step performed at 750.about.850 degrees centigrade for 10.about.60 seconds. If the metal layer is selected from a group consisting of nickel and an alloy thereof is formed on a silicon layer, the first step of the second thermal process is performed at 300.about.400 degrees centigrade for 10.about.60 seconds and the second step of the second thermal process is performed at 450.about.550 degrees centigrade for 10.about.60 seconds.








 
 
  Recently Added Patents
Plants and seeds of hybrid corn variety CH424126
Virtual multi-cluster clouds
Business flow processing method and apparatus
Image processing apparatus, image display apparatus, and image processing method
Power converter and method including noise suppression by controlling phase shifting of converter cells
Image processing apparatus and image processing method
Managing job execution
  Randomly Featured Patents
Adaptive update of seek time prediction data
Drive device for motor vehicle sliding sunroofs
Sanitary tissue products with improved flushability
Electrical switch with sliding terminal contacts
Apparatus and method for driving an LED
Golf ball with improved cover
Printable self-wound fire retardant pressure-sensitive adhesive tape
Animal trap
Mailing machine including postage meter having rotary postage printing drum provided with an envelope deflector
Collection and recycling unit for used containers