Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Salicide process










Image Number 3 for United States Patent #7238611.

A salicide process is provided. A metal layer selected from a group consisting of titanium, cobalt, platinum, palladium and an alloy thereof is formed over a silicon layer. A first thermal process is performed. Next, a second thermal process is performed, wherein the second thermal process includes a first step performed at 600.about.700 degrees centigrade for 10.about.60 seconds and a second step performed at 750.about.850 degrees centigrade for 10.about.60 seconds. If the metal layer is selected from a group consisting of nickel and an alloy thereof is formed on a silicon layer, the first step of the second thermal process is performed at 300.about.400 degrees centigrade for 10.about.60 seconds and the second step of the second thermal process is performed at 450.about.550 degrees centigrade for 10.about.60 seconds.








 
 
  Recently Added Patents
Inverter, NAND gate, and NOR gate
Blocky hydroxyethylcellulose, derivatives thereof, process of making and uses thereof
Configurations and methods for effluent gas treatment
Communication device and method for detecting a radio signal
Integrated circuit packaging system with an encapsulation and method of manufacture thereof
Lubricant supplying device, process cartridge, and image forming apparatus
Signal processing apparatus and methods
  Randomly Featured Patents
Railway gondola car
Material testing device
Squelch circuit and communication apparatus used with the same
Surface protective films
Differential valve in fuel injection nozzle
Container handle or similar article
Driver circuit, with low idle power consumption, for an attachment unit interface
Container for preparation of sauce-covered chicken wings
Liquid-metal magnetohydrodynamic converter
Furniture