Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Salicide process










Image Number 3 for United States Patent #7238611.

A salicide process is provided. A metal layer selected from a group consisting of titanium, cobalt, platinum, palladium and an alloy thereof is formed over a silicon layer. A first thermal process is performed. Next, a second thermal process is performed, wherein the second thermal process includes a first step performed at 600.about.700 degrees centigrade for 10.about.60 seconds and a second step performed at 750.about.850 degrees centigrade for 10.about.60 seconds. If the metal layer is selected from a group consisting of nickel and an alloy thereof is formed on a silicon layer, the first step of the second thermal process is performed at 300.about.400 degrees centigrade for 10.about.60 seconds and the second step of the second thermal process is performed at 450.about.550 degrees centigrade for 10.about.60 seconds.








 
 
  Recently Added Patents
Message transfer apparatus, output method, and computer program product
Deadline-driven parallel execution of queries
Segmenting video based on timestamps in comments
Modular utility rack
Correlating trace data streams
User control of replacement television advertisements inserted by a smart television
Video editing apparatus
  Randomly Featured Patents
Momentary activation of mechanical front wheel drive
Method for developing software code and estimating processor execution time
Semi-curtain facade
Ionizing radiation detection apparatus using high-resistivity semiconductor
Techniques for making a metallic product utilizing electric current in a consolidation process
Personal weapon system
Laminated glass
Growth of reduced dislocation density non-polar gallium nitride
Method and apparatus for sensing positions of device enclosures within multi-shelf cabinets
Dynamic database access via standard query language and abstraction technology