Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Salicide process










Image Number 3 for United States Patent #7238611.

A salicide process is provided. A metal layer selected from a group consisting of titanium, cobalt, platinum, palladium and an alloy thereof is formed over a silicon layer. A first thermal process is performed. Next, a second thermal process is performed, wherein the second thermal process includes a first step performed at 600.about.700 degrees centigrade for 10.about.60 seconds and a second step performed at 750.about.850 degrees centigrade for 10.about.60 seconds. If the metal layer is selected from a group consisting of nickel and an alloy thereof is formed on a silicon layer, the first step of the second thermal process is performed at 300.about.400 degrees centigrade for 10.about.60 seconds and the second step of the second thermal process is performed at 450.about.550 degrees centigrade for 10.about.60 seconds.








 
 
  Recently Added Patents
Synergistic fungicidal interactions of 5-fluorocytosine and other fungicides
Fluid conduit with PTC fabric heating
Methods of establishing virtual circuits and of providing a virtual private network service through a shared network, and provider edge device for such network
Neuronal differentiation-inducing peptide and use thereof
Dispenser
Method for producing carrier on which microorganisms capable of conducting multiple parallel mineralization are immobilized, column reactor and solid medium for cultivating plants
Image forming apparatus assembled with a fixing member and a pressing member
  Randomly Featured Patents
Method for synthesizing aluminum hydride
Plasma arc torch rotational assembly
Sanding disc container
Cell culture chamber with means for automatic replenishment of nutrient
Concrete stake puller
Placementing method of reinforcing strips for constructing precast concrete facing panel and pulling-up device of reinforcing strips
Running board
Method and apparatus for on-chip duty cycle measurement
Disc refiner with conical ribbon feeder
Optical disk apparatus for recording and reproducing compression encoded video signal