Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Oxygen plasma treatment for enhanced HDP-CVD gapfill










Image Number 7 for United States Patent #7229931.

Methods are provided for depositing a silicon oxide film on a substrate disposed in a substrate processing chamber. The substrate has a gap formed between adjacent raised surfaces. A process gas having a silicon-containing gas, an oxygen-containing gas, and a fluent gas is flowed into the substrate processing chamber. The fluent gas is introduced into the substrate processing chamber at a flow rate of at least 500 sccm. A plasma is formed having an ion density of at least 10.sup.11 ions/cm.sup.3 from the process gas to deposit a first portion of the silicon oxide film over the substrate and into the gap. Thereafter, the deposited first portion is exposed to an oxygen plasma having at least 10.sup.11 ions/cm.sup.3. Thereafter, a second portion of the silicon oxide film is deposited over the substrate and into the gap.








 
 
  Recently Added Patents
Optical connector
Enhanced signal wraparound monitor
Apparatus for moving a non-ambulatory individual up and down steps
Anti-snoring device
Machine for manufacturing personal sanitary items
System and method for supporting JIT in a secure system with randomly allocated memory ranges
System and method for dynamically configuring a serial data link in a display device
  Randomly Featured Patents
Electromagnet for an extremely inverse time overcurrent protective relay
Image viewing device and operation unit for said image viewing device, accessories used with said image viewing device, a facility in which said device and accessories are used, and method of
Automatic means for controlling dosage of illuminating light for picking-up image by endoscope assembly
System for conveying a fluid through an under-the-ground location and method of making the same
Mobile control and monitoring system
Soapfilm flowmeter device for measuring gas flow rates
Filtration apparatus
Biosensor, sleep information processing method and apparatus, computer program thereof and computer readable storage medium thereof
Lubricating device for transmissions or the like in starting condition
Short circuit detection in particular for a measuring bridge