Resources Contact Us Home
Oxygen plasma treatment for enhanced HDP-CVD gapfill

Image Number 7 for United States Patent #7229931.

Methods are provided for depositing a silicon oxide film on a substrate disposed in a substrate processing chamber. The substrate has a gap formed between adjacent raised surfaces. A process gas having a silicon-containing gas, an oxygen-containing gas, and a fluent gas is flowed into the substrate processing chamber. The fluent gas is introduced into the substrate processing chamber at a flow rate of at least 500 sccm. A plasma is formed having an ion density of at least 10.sup.11 ions/cm.sup.3 from the process gas to deposit a first portion of the silicon oxide film over the substrate and into the gap. Thereafter, the deposited first portion is exposed to an oxygen plasma having at least 10.sup.11 ions/cm.sup.3. Thereafter, a second portion of the silicon oxide film is deposited over the substrate and into the gap.

  Recently Added Patents
Method and apparatus for management and analysis of services in VoIP networks
Collaborative system for capture and reuse of software application knowledge and a method of realizing same
Phase locking loop
Enabling improvement in cellular network coverage
Method and system for physical verification using network segment current
Label printer
Systems and methods for generating a hybrid text string from two or more text strings generated by multiple automated speech recognition systems
  Randomly Featured Patents
Apparatus and process for the gas flotation purification of oil-contaminated water
Method of protecting the integrity of messages sent in a mobile radio system
Optimized light guide array for an image sensor
Paucilamellar lipid vesicles
Process for preparing hydantoins or cyclic anhydrides of an amino acid
System and method for accessing internet-based information resources by scanning Java-Applet encoded bar code symbols
Viscous water-based surfactant preparation
Method of producing 1,2-polybutadiene
Device and method for transferring fluids within a surgical environment
Non-flammable air freshener composition