Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Oxygen plasma treatment for enhanced HDP-CVD gapfill










Image Number 7 for United States Patent #7229931.

Methods are provided for depositing a silicon oxide film on a substrate disposed in a substrate processing chamber. The substrate has a gap formed between adjacent raised surfaces. A process gas having a silicon-containing gas, an oxygen-containing gas, and a fluent gas is flowed into the substrate processing chamber. The fluent gas is introduced into the substrate processing chamber at a flow rate of at least 500 sccm. A plasma is formed having an ion density of at least 10.sup.11 ions/cm.sup.3 from the process gas to deposit a first portion of the silicon oxide film over the substrate and into the gap. Thereafter, the deposited first portion is exposed to an oxygen plasma having at least 10.sup.11 ions/cm.sup.3. Thereafter, a second portion of the silicon oxide film is deposited over the substrate and into the gap.








 
 
  Recently Added Patents
Combination of the application of antibodies for immunostimulation together with glucocorticoids
Method and device for generating low-jitter clock
Imaging device
Preferential selection of candidates for delta compression
Method and apparatus for band switching in wireless local access network
Global alignment for high-dynamic range image generation
Method for detection and characterization of a microorganism in a sample using time-dependent intrinsic fluorescence measurements
  Randomly Featured Patents
Memory management methods in a computer system with shared memory mappings
Grommet assembly
Method of compressing a fluid flow in a multi stage centrifugal impeller
Method of improving quality of wheat flour
Local gradient coil
Toe-nailing hammer
Ultrasonic motor
Method of and apparatus for sideward displacement of sheets
Image forming apparatus featuring first and second cleaners operable on the basis of an interval of an image forming process during a continuous image forming process
Human ubiquitin-conjugating enzyme