Resources Contact Us Home
Oxygen plasma treatment for enhanced HDP-CVD gapfill

Image Number 7 for United States Patent #7229931.

Methods are provided for depositing a silicon oxide film on a substrate disposed in a substrate processing chamber. The substrate has a gap formed between adjacent raised surfaces. A process gas having a silicon-containing gas, an oxygen-containing gas, and a fluent gas is flowed into the substrate processing chamber. The fluent gas is introduced into the substrate processing chamber at a flow rate of at least 500 sccm. A plasma is formed having an ion density of at least 10.sup.11 ions/cm.sup.3 from the process gas to deposit a first portion of the silicon oxide film over the substrate and into the gap. Thereafter, the deposited first portion is exposed to an oxygen plasma having at least 10.sup.11 ions/cm.sup.3. Thereafter, a second portion of the silicon oxide film is deposited over the substrate and into the gap.

  Recently Added Patents
Method of making a CIG target by cold spraying
Alleviation of laser-induced damage in optical materials by suppression of transient color centers formation and control of phonon population
Resin composition and molded article
Wavelength and power scalable waveguiding-based infrared laser system
Automated security analysis for federated relationship
Motor and disk drive apparatus
Plants and seeds of hybrid corn variety CH717591
  Randomly Featured Patents
Method and portable system for phonetic language translation using brain interface
Electrical connector for dual printed circuit boards
Support for nogging strips in wall frames
System and method for improved auto-boating
Method for fabricating integrated circuit having at least three linear-shaped gate electrode level conductive features of equal length positioned side-by-side at equal pitch
Method and apparatus for weaving an elongated fabric
Apparatus to clear oil from the hoses and front end of a recovery recharge machine
Matted release coat for self-wound thermal printable facestock
DC/DC power conversion device
Polymeric compositions, oil compositions containing said polymeric compositions, transmission fluids and hydraulic fluids