Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method and apparatus for position-dependent optical metrology calibration










Image Number 3 for United States Patent #7215419.

A calibration method suitable for highly precise and highly accurate surface metrology measurements is described. In preferred embodiments, an optical inspection tool including a movable optics system is characterized in terms of position and wavelength dependent quantities over a range of motion. Once the position-dependant quantities are determined at various wavelengths and positions, they are stored and used to interpret data from test wafers having an unknown metrology. Free of position-dependent variations and other information pertaining to the measurement system, the accuracy of the resulting wafer measurement more closely matches the precision of the tool than existing techniques. In particular embodiments, a portion of the characterization of the optical system is accomplished by using tilted black glass to provide a non-reflective reference.








 
 
  Recently Added Patents
Method to quantify siRNAs, miRNAs and polymorphic miRNAs
System and method for providing advice to consumer regarding a payment transaction
Display window with level of service graphical user interface
Mobile terminal and method for changing page thereof
Computer-implemented method of constructing a stock index using index rotation
Single-lens reflex digital camera which displays an image for live view
Vehicle and communication monitoring
  Randomly Featured Patents
Reagent bottle and cap
Dustproof suit for clean room
Sound deadening and catalyst treating system
Method and apparatus for soldering and soldering land of a printed circuit board
Method for forming ion-implanted self-aligned gate structure by controlled ion scattering
Method for controlling the toner concentration in an electrostatic copier
Cost-based routing using backoff scheme
Descriptor management systems and methods for transferring data between a host and a peripheral
Blood vessel projection imaging system using nuclear magnetic resonance
Magnetic resonance imaging apparatus and magnetic resonance imaging method