Resources Contact Us Home
Method and apparatus for position-dependent optical metrology calibration

Image Number 3 for United States Patent #7215419.

A calibration method suitable for highly precise and highly accurate surface metrology measurements is described. In preferred embodiments, an optical inspection tool including a movable optics system is characterized in terms of position and wavelength dependent quantities over a range of motion. Once the position-dependant quantities are determined at various wavelengths and positions, they are stored and used to interpret data from test wafers having an unknown metrology. Free of position-dependent variations and other information pertaining to the measurement system, the accuracy of the resulting wafer measurement more closely matches the precision of the tool than existing techniques. In particular embodiments, a portion of the characterization of the optical system is accomplished by using tilted black glass to provide a non-reflective reference.

  Recently Added Patents
Method for manufacturing a semiconductor device
Solar cell with structured gridline endpoints vertices
Mobile station and radio base station
Structured block transfer module, system architecture, and method for transferring
Alarm panel phone number capture and substitution
Spring-loaded drive with active feedback in DC circuit
Test head moving apparatus and electronic component testing apparatus
  Randomly Featured Patents
Trifluoromethyl dibenzo[a,c]phenazines as immune regulants
Histamine H3 receptor agents, preparation and therapeutic uses
Management of data and computation in data centers
Transducer device including feedback circuit
Actuating drive with a housing with sealing means
Thermally balanced PN junction
Thiazole derivatives active on the cholinergic system, process for obtention and pharmaceutical compositions
Active pixel sensor pixel having a photodetector whose output is coupled to an output transistor gate
Vial for regulating pressure
Method for determining the position of an organ