Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method and apparatus for position-dependent optical metrology calibration










Image Number 3 for United States Patent #7215419.

A calibration method suitable for highly precise and highly accurate surface metrology measurements is described. In preferred embodiments, an optical inspection tool including a movable optics system is characterized in terms of position and wavelength dependent quantities over a range of motion. Once the position-dependant quantities are determined at various wavelengths and positions, they are stored and used to interpret data from test wafers having an unknown metrology. Free of position-dependent variations and other information pertaining to the measurement system, the accuracy of the resulting wafer measurement more closely matches the precision of the tool than existing techniques. In particular embodiments, a portion of the characterization of the optical system is accomplished by using tilted black glass to provide a non-reflective reference.








 
 
  Recently Added Patents
Method and apparatus for detecting an intermittent path to a storage system
Reducing energy and increasing speed by an instruction substituting subsequent instructions with specific function instruction
Hemostatic devices and methods of making same
Method, system and program for securing redundancy in parallel computing system
Integrated control system for stability control of yaw, roll and lateral motion of a driving vehicle using an integrated sensing system to determine longitudinal velocity
Wireless enclosure
Portable gaming device and gaming system combining both physical and virtual play elements
  Randomly Featured Patents
Portable solar heater and method for using the same
Dirty paper coding and reference signal design
Boundary acoustic wave filter
5H-Indeno[5,6-b]furans
Surface acoustic wave resonator, surface acoustic wave filter and surface acoustic wave duplexer, and communications equipment
Tape dispensing device
Device for measuring quantities of heat while simultaneously measuring the evaporation kinetics and/or condensation kinetics of the most minute amounts of liquid in order to determine thermody
Oriented polyamide fiber and process for producing same
Laser-enhanced oil correlation system
Packaging for photosensitive dyes