Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method and apparatus for position-dependent optical metrology calibration










Image Number 3 for United States Patent #7215419.

A calibration method suitable for highly precise and highly accurate surface metrology measurements is described. In preferred embodiments, an optical inspection tool including a movable optics system is characterized in terms of position and wavelength dependent quantities over a range of motion. Once the position-dependant quantities are determined at various wavelengths and positions, they are stored and used to interpret data from test wafers having an unknown metrology. Free of position-dependent variations and other information pertaining to the measurement system, the accuracy of the resulting wafer measurement more closely matches the precision of the tool than existing techniques. In particular embodiments, a portion of the characterization of the optical system is accomplished by using tilted black glass to provide a non-reflective reference.








 
 
  Recently Added Patents
Optical writer and image forming apparatus including same
System and method for displaying relationships between electronically stored information to provide classification suggestions via inclusion
Document-related representative information
Mounting structure, electro-optical apparatus, and touch panel
Delivery of captions, content advisory and other data through digital interface
Molten alloy solidification analyzing method and solidification analyzing program for performing the same
Inspection systems and methods for detecting defects on extreme ultraviolet mask blanks
  Randomly Featured Patents
Multi-articulated arm type industrial laser robot
Cash register
Sharing physical memory locations in memory devices
Apparatus for high speed rotation of electrically operated devices
Stand by control circuit
Reduced flammability plastic formulation and method
Vapor receiving system for a dispensing nozzle
Lead-free glass frits for ceramic enamels
Method of in-device phase measurement and correlation to programmable factors
Compressor for a vehicle air conditioner