Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method and apparatus for position-dependent optical metrology calibration










Image Number 3 for United States Patent #7215419.

A calibration method suitable for highly precise and highly accurate surface metrology measurements is described. In preferred embodiments, an optical inspection tool including a movable optics system is characterized in terms of position and wavelength dependent quantities over a range of motion. Once the position-dependant quantities are determined at various wavelengths and positions, they are stored and used to interpret data from test wafers having an unknown metrology. Free of position-dependent variations and other information pertaining to the measurement system, the accuracy of the resulting wafer measurement more closely matches the precision of the tool than existing techniques. In particular embodiments, a portion of the characterization of the optical system is accomplished by using tilted black glass to provide a non-reflective reference.








 
 
  Recently Added Patents
Method and apparatus for belling plastic pipe
Implantable device
Push button
Flexible circuit routing
Estimating stack distances
Packaging for socks
Cycloalkylamine substituted isoquinoline derivatives
  Randomly Featured Patents
Laterally unstable small water craft with stabilizing wings
Thermostatically responsive valve
Method and apparatus for determining a game series comprising a plurality of individually selectable wagering games
Battery with gelled electrolyte
Entropy processor for decoding
Non-linear photonic switch
Timebase circuit
Apparatus and method for transporting motorcycles
Thermal protection device using the vaporization and superheating of a rechargeable liquid
Cooling apparatus for outboard motor