Resources Contact Us Home
Method and apparatus for position-dependent optical metrology calibration

Image Number 3 for United States Patent #7215419.

A calibration method suitable for highly precise and highly accurate surface metrology measurements is described. In preferred embodiments, an optical inspection tool including a movable optics system is characterized in terms of position and wavelength dependent quantities over a range of motion. Once the position-dependant quantities are determined at various wavelengths and positions, they are stored and used to interpret data from test wafers having an unknown metrology. Free of position-dependent variations and other information pertaining to the measurement system, the accuracy of the resulting wafer measurement more closely matches the precision of the tool than existing techniques. In particular embodiments, a portion of the characterization of the optical system is accomplished by using tilted black glass to provide a non-reflective reference.

  Recently Added Patents
Door-activated entry light fixture
Image scanner and image forming apparatus
Jet pump and reactor
Plants and seeds of hybrid corn variety CH260114
Leadless integrated circuit packaging system and method of manufacture thereof
Methods, systems and computer program products for importing data from an edge router to a network management system
Method for media access controlling and system and method for channel time reservation in distributed wireless personal area network
  Randomly Featured Patents
Process for the preparation of aqueous polymer dispersions, aqueous polymer dispersions prepared by this process and the use of these polymer dispersions
Bumper structure for vehicle having tiltable load carrier member
ESP/separator assembly and method
System and method for local machine zone lockdown with relation to a network browser
Bottle return apparatus
Light steel structural members
Subsurface signal transmitting apparatus
Extrusion head for moldings to be used in the construction of window, door and the like frames
Indicating arrangement for portable electric devices
Fluid injection system