Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method and apparatus for position-dependent optical metrology calibration










Image Number 3 for United States Patent #7215419.

A calibration method suitable for highly precise and highly accurate surface metrology measurements is described. In preferred embodiments, an optical inspection tool including a movable optics system is characterized in terms of position and wavelength dependent quantities over a range of motion. Once the position-dependant quantities are determined at various wavelengths and positions, they are stored and used to interpret data from test wafers having an unknown metrology. Free of position-dependent variations and other information pertaining to the measurement system, the accuracy of the resulting wafer measurement more closely matches the precision of the tool than existing techniques. In particular embodiments, a portion of the characterization of the optical system is accomplished by using tilted black glass to provide a non-reflective reference.








 
 
  Recently Added Patents
System and method of interfacing co-processors and input/output devices via a main memory system
Support for a parameterized query/view in complex event processing
Arcuate motion control in electrostatic actuators
Graphical user interface for interpreting the results of image analysis
Determination and presentation of package pricing offers in response to customer interest in a product
Acceleration based mode switch
Portable computer display structures
  Randomly Featured Patents
Screwdriver handle
Gravity actuated toy device
Electron gun for a color picture tube
Optical amplifier and optical amplifier arrangement with reduced cross phase modulation
Tubing misload detection mechanism for an infusion pump
Fingerprinting of fragment shaders and use of same to perform shader concatenation
Method of and apparatus for printing a color image using dichroic filters and a phosphor which strongly emits red light and weakly emits green and blue light
Aqueous emulsion polymerization of functionalized fluoromonomers
Dental tray
Display device