Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method and apparatus for treating article to be treated










Image Number 3 for United States Patent #7208428.

A thermal treatment apparatus 1 includes a reaction tube 2 for containing wafers 10 contaminated with organic substances having a heater 12 capable of heating the reaction tube; a first gas supply pipe 13 for carrying oxygen gas into the reaction tube 2; and a second gas supply pipe 14 for carrying hydrogen gas into the reaction tube 2. Oxygen gas and hydrogen gas are supplied through the first gas supply pipe 13 and the second gas supply pipe 14, respectively, into the reaction tube 2, and the heater 12 heats the reaction tube 2 at a temperature capable of activating oxygen gas and hydrogen gas. A combustion reaction occurs in the reaction tube 2 and thereby the organic substances adhering to the wafers 10 are oxidized, decomposed and removed.








 
 
  Recently Added Patents
Global alignment for high-dynamic range image generation
Baseball player stationery tab
Isoselective polymerization of epoxides
Categorizing bit errors of solid-state, non-volatile memory
Image processing apparatus, image processing system, and image processing method
Antimony and germanium complexes useful for CVD/ALD of metal thin films
Kit and method for the capture of tumor cells
  Randomly Featured Patents
IGBT with amorphous silicon transparent collector
Method and system for extracting information from electronic data sources
Visual and radar emergency detection balloon
Herbicide intermediates
Method for making animal feed from manure
Opening and closing means for electrically controlled shutters
Molded plastic gasket having a combination sealing bead
Wick bar lift
Interactive home terminal employing common consumer-electronics as components in a manner to facilitate the bi-directional communication of data
System of management of the trimming of integrated fuses within a scan test architecture