Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Pressure sensor with apertured membrane guard










Image Number 11 for United States Patent #7194901.

A pressure sensor (30) for harsh environments such as vehicle tires, formed from a wafer substrate (32) with a recess, a flexible membrane (50) covering the recess to define a chamber (58) containing a fluid at a reference pressure. In use, the flexible membrane (50) deflects due to pressure differentials between the reference pressure and the fluid pressure. Associated circuitry (34) converts the deflection of the flexible membrane (50) into an output signal indicative of the fluid pressure. An apertured guard (54) over the membrane formed using lithographically masked etching and deposition techniques protects the delicate MEMS structures. Forming the guard in situ by depositing material offers greater time efficiency and accuracy than producing a guard separately and securing it over the membrane. Semiconductor etching and deposition techniques allow highly intricate surface details. The apertures in the guard can be made smaller to exclude more particles from contacting the membrane. The fine tolerances of lithographic deposition permit the guard to be positioned close to the membrane for a more compact overall design.








 
 
  Recently Added Patents
Device and method for arranging vials
Method and apparatus for allocating erasure coded data to disk storage
Determining system for localization methods combination
Data security for dynamic random access memory using body bias to clear data at power-up
Printed wiring board with reinforced insulation layer and manufacturing method thereof
Multilayer films having reduced curling
Arbitration for memory device with commands
  Randomly Featured Patents
Filter element of an air filter with far infrared energy
Interchangeable coupling
Fault detecting system for a control system
Table saws with safety systems and systems to mount and index attachments
Front housing for a mobile device
Apparatus for measuring mechanical stress using white X-rays
Cassette clamp for a microtome
Detection unit and method for the detection of data symbols
Transmitter having temperature-compensated detector
Plastic packaging cushion