Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Pressure sensor with apertured membrane guard










Image Number 11 for United States Patent #7194901.

A pressure sensor (30) for harsh environments such as vehicle tires, formed from a wafer substrate (32) with a recess, a flexible membrane (50) covering the recess to define a chamber (58) containing a fluid at a reference pressure. In use, the flexible membrane (50) deflects due to pressure differentials between the reference pressure and the fluid pressure. Associated circuitry (34) converts the deflection of the flexible membrane (50) into an output signal indicative of the fluid pressure. An apertured guard (54) over the membrane formed using lithographically masked etching and deposition techniques protects the delicate MEMS structures. Forming the guard in situ by depositing material offers greater time efficiency and accuracy than producing a guard separately and securing it over the membrane. Semiconductor etching and deposition techniques allow highly intricate surface details. The apertures in the guard can be made smaller to exclude more particles from contacting the membrane. The fine tolerances of lithographic deposition permit the guard to be positioned close to the membrane for a more compact overall design.








 
 
  Recently Added Patents
Materials and methods for hypothermic collection of whole blood
Methods and systems for spurious cancellation in seismic signal detection
Helmet
Systems and methods for using property tables to perform non-iterative malware scans
Lighting apparatus
Processing data using sequential dependencies
Nasal dilator and methods of fabricating medical devices
  Randomly Featured Patents
Method of instrumenting garbage collection generating a trace file making a single pass analysis of object heap
Method of producing nanocrystalline alloy having high permeability
Method for production of metered amounts of drinks, especially coffee
Truck operator's cab with equipment control station
Segmented effusion cooled gas turbine engine combustor
Power supply apparatus for electronic unit
Nonvolatile semiconductor memory
Apparatus for clamping a work piece
Device for influencing an electron beam
Heat pipe manifold heat exchanger