Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Pressure sensor with apertured membrane guard










Image Number 11 for United States Patent #7194901.

A pressure sensor (30) for harsh environments such as vehicle tires, formed from a wafer substrate (32) with a recess, a flexible membrane (50) covering the recess to define a chamber (58) containing a fluid at a reference pressure. In use, the flexible membrane (50) deflects due to pressure differentials between the reference pressure and the fluid pressure. Associated circuitry (34) converts the deflection of the flexible membrane (50) into an output signal indicative of the fluid pressure. An apertured guard (54) over the membrane formed using lithographically masked etching and deposition techniques protects the delicate MEMS structures. Forming the guard in situ by depositing material offers greater time efficiency and accuracy than producing a guard separately and securing it over the membrane. Semiconductor etching and deposition techniques allow highly intricate surface details. The apertures in the guard can be made smaller to exclude more particles from contacting the membrane. The fine tolerances of lithographic deposition permit the guard to be positioned close to the membrane for a more compact overall design.








 
 
  Recently Added Patents
Luggage cart
Memory controller including a hardware compression and decompression engine for managing system memory and graphical operations
Temporal document trainer and method
Apparatus and method for extracting cascading style sheet rules
Securing information by hiding identity on a computing device
Method and system for utilizing Perovskite material for charge storage and as a dielectric
High order continuous time filter
  Randomly Featured Patents
Fused N-phenylsulfonyl-N-triazinylureas
Method for manufacturing plasma display panel
Shoe
Door (for kitchen furniture)
Method and apparatus for quickly transferring data from a first bus to a second bus
Fluid servo system for fuel injection and other applications
Intravaginal sanitary device
Folding transportation rack and product delivery system
Fan blade bracket
1-hydroxy-1,2,4-triazole compounds useful as fungicides