Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Pressure sensor with apertured membrane guard










Image Number 11 for United States Patent #7194901.

A pressure sensor (30) for harsh environments such as vehicle tires, formed from a wafer substrate (32) with a recess, a flexible membrane (50) covering the recess to define a chamber (58) containing a fluid at a reference pressure. In use, the flexible membrane (50) deflects due to pressure differentials between the reference pressure and the fluid pressure. Associated circuitry (34) converts the deflection of the flexible membrane (50) into an output signal indicative of the fluid pressure. An apertured guard (54) over the membrane formed using lithographically masked etching and deposition techniques protects the delicate MEMS structures. Forming the guard in situ by depositing material offers greater time efficiency and accuracy than producing a guard separately and securing it over the membrane. Semiconductor etching and deposition techniques allow highly intricate surface details. The apertures in the guard can be made smaller to exclude more particles from contacting the membrane. The fine tolerances of lithographic deposition permit the guard to be positioned close to the membrane for a more compact overall design.








 
 
  Recently Added Patents
Agglutination judgment method
Method and apparatus for wireless transmission of diagnostic information
Real-image zoom viewfinder and imaging apparatus
Method for treating hyperglycemia
Rim for a TV receiver
Lid for a container
Positive electrode active material for nonaqueous electrolyte secondary battery
  Randomly Featured Patents
Thin film resistor and a method of producing the same
Telephone call connection method with automated paging and call bridging
Port for injecting medicaments
All terrain vehicle
Method and control device to operate a magnetic resonance system
Connection of a metal pipe with a metal sleeve
Composition for curing polyurethanes
Apparatus for optically reproducing an information signal from a record disk
Single stack kernel
Apparatus for checking geometrical features of pieces with rotational symmetry