Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Pressure sensor with apertured membrane guard










Image Number 11 for United States Patent #7194901.

A pressure sensor (30) for harsh environments such as vehicle tires, formed from a wafer substrate (32) with a recess, a flexible membrane (50) covering the recess to define a chamber (58) containing a fluid at a reference pressure. In use, the flexible membrane (50) deflects due to pressure differentials between the reference pressure and the fluid pressure. Associated circuitry (34) converts the deflection of the flexible membrane (50) into an output signal indicative of the fluid pressure. An apertured guard (54) over the membrane formed using lithographically masked etching and deposition techniques protects the delicate MEMS structures. Forming the guard in situ by depositing material offers greater time efficiency and accuracy than producing a guard separately and securing it over the membrane. Semiconductor etching and deposition techniques allow highly intricate surface details. The apertures in the guard can be made smaller to exclude more particles from contacting the membrane. The fine tolerances of lithographic deposition permit the guard to be positioned close to the membrane for a more compact overall design.








 
 
  Recently Added Patents
Estimating optical characteristics of a camera component using sharpness sweep data
Integrated circuit with electromagnetic intrachip communication and methods for use therewith
System for determining potential lot consolidation during manufacturing
Automobile body
Sonic fast-sync system and method for bluetooth
Semiconductor device
Filler containing composition and process for production and use thereof
  Randomly Featured Patents
Hydrolytic enzyme mixtures for saccharification of lignocellulosic polysaccharides
Method and apparatus for trimming high-resolution digital-to-analog converter
Lidded pet dish
Compact reed valve
Electronic irrigation system software
Wheel cover
Hydrocarbon process for increasing the concentration of normal cis olefins
Electronic apparatus, imaging apparatus, and grip structure
Method and apparatus for attracting insects
Net wrap applicator for large round bales