Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Pressure sensor with apertured membrane guard










Image Number 11 for United States Patent #7194901.

A pressure sensor (30) for harsh environments such as vehicle tires, formed from a wafer substrate (32) with a recess, a flexible membrane (50) covering the recess to define a chamber (58) containing a fluid at a reference pressure. In use, the flexible membrane (50) deflects due to pressure differentials between the reference pressure and the fluid pressure. Associated circuitry (34) converts the deflection of the flexible membrane (50) into an output signal indicative of the fluid pressure. An apertured guard (54) over the membrane formed using lithographically masked etching and deposition techniques protects the delicate MEMS structures. Forming the guard in situ by depositing material offers greater time efficiency and accuracy than producing a guard separately and securing it over the membrane. Semiconductor etching and deposition techniques allow highly intricate surface details. The apertures in the guard can be made smaller to exclude more particles from contacting the membrane. The fine tolerances of lithographic deposition permit the guard to be positioned close to the membrane for a more compact overall design.








 
 
  Recently Added Patents
Circuit for compressing data and a processor employing same
Software execution management apparatus, method, and computer-readable medium thereof
Communication terminal, communication system, server apparatus, and communication connecting method
(4929
Antenna array system
Solid-state image pickup element, method of manufacturing the same, and image pickup apparatus including the same
Systems and/or methods for using air/wind power to charge/re-charge vehicle batteries
  Randomly Featured Patents
Bracket
Thermal envelope
Electrochromic display device
Lock protector
Semiconductor device, method of manufacturing same and circuit arrangement comprising the device
Cableless air conditioner control system and method
Frequency converter with high protection
Phase shifter
Molecular nanowires from single walled carbon nanotubes
Disk drive system which uses a common DAC for digital positioning control and analog positioning control