Resources Contact Us Home
Pressure sensor with apertured membrane guard

Image Number 11 for United States Patent #7194901.

A pressure sensor (30) for harsh environments such as vehicle tires, formed from a wafer substrate (32) with a recess, a flexible membrane (50) covering the recess to define a chamber (58) containing a fluid at a reference pressure. In use, the flexible membrane (50) deflects due to pressure differentials between the reference pressure and the fluid pressure. Associated circuitry (34) converts the deflection of the flexible membrane (50) into an output signal indicative of the fluid pressure. An apertured guard (54) over the membrane formed using lithographically masked etching and deposition techniques protects the delicate MEMS structures. Forming the guard in situ by depositing material offers greater time efficiency and accuracy than producing a guard separately and securing it over the membrane. Semiconductor etching and deposition techniques allow highly intricate surface details. The apertures in the guard can be made smaller to exclude more particles from contacting the membrane. The fine tolerances of lithographic deposition permit the guard to be positioned close to the membrane for a more compact overall design.

  Recently Added Patents
Display system with mounting assemblies and associated methods
Microcapsules, their use and processes for their manufacture
Apparatus, electronic component and method for generating reference voltage
Reuse of static image data from prior image frames to reduce rasterization requirements
Laser protection polymeric materials
Lamination sheet
Social network user data advertising
  Randomly Featured Patents
Continuous mode solder jet apparatus
Water spraying gun
Preparation method of functional master batch of polyolefin and its application
Integrated lancet and analyte testing apparatus
Method and device for monitoring blind spots of a motor vehicle
Device for facilitating cardioplegia delivery in patients with aortic insufficiency
Soft sided golf ball dispenser
Semiconductor device having a polycrystalline silicon film with crystal grains having a uniform orientation
Comparator for input voltages higher than supply voltage
Diode having vertical structure and method of manufacturing the same