Resources Contact Us Home Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE     Pressure sensor with apertured membrane guard Image Number 11 for United States Patent #7194901. A pressure sensor (30) for harsh environments such as vehicle tires, formed from a wafer substrate (32) with a recess, a flexible membrane (50) covering the recess to define a chamber (58) containing a fluid at a reference pressure. In use, the flexible membrane (50) deflects due to pressure differentials between the reference pressure and the fluid pressure. Associated circuitry (34) converts the deflection of the flexible membrane (50) into an output signal indicative of the fluid pressure. An apertured guard (54) over the membrane formed using lithographically masked etching and deposition techniques protects the delicate MEMS structures. Forming the guard in situ by depositing material offers greater time efficiency and accuracy than producing a guard separately and securing it over the membrane. Semiconductor etching and deposition techniques allow highly intricate surface details. The apertures in the guard can be made smaller to exclude more particles from contacting the membrane. The fine tolerances of lithographic deposition permit the guard to be positioned close to the membrane for a more compact overall design.       Recently Added Patents Preferential oxidation catalyst containing platinum, copper and iron Beverages and foodstuffs resistant to light induced flavor changes, processes for making the same, and compositions for imparting such resistance Communication system adapting for car, communication apparatus adapting for car, and communication method adapting for car Passive cooling system for a turbomachine System and method for interfacing between an on-board diagnostic output and a distance measuring instrument input Control of exhaust systems Channel structures for a quasi-orthogonal multiple-access communication system   Randomly Featured Patents Octahydro-1,4-diazepino[1,7-b]isoquinolines Building element Electrodeposition of palladium films Method and apparatus for the treatment of flexible material Yarn feeding means and a yarn winder including the same Solid electrolytic capacitor and method of manufacturing the same Barrier free computer keyboard Method and means of assimilating utility meter data Sign language generation apparatus and sign language translation apparatus Magnetic head and structure for supporting same © 2006-2008 PatentGenius. All Rights Reserved.