Resources Contact Us Home
Pressure sensor with apertured membrane guard

Image Number 11 for United States Patent #7194901.

A pressure sensor (30) for harsh environments such as vehicle tires, formed from a wafer substrate (32) with a recess, a flexible membrane (50) covering the recess to define a chamber (58) containing a fluid at a reference pressure. In use, the flexible membrane (50) deflects due to pressure differentials between the reference pressure and the fluid pressure. Associated circuitry (34) converts the deflection of the flexible membrane (50) into an output signal indicative of the fluid pressure. An apertured guard (54) over the membrane formed using lithographically masked etching and deposition techniques protects the delicate MEMS structures. Forming the guard in situ by depositing material offers greater time efficiency and accuracy than producing a guard separately and securing it over the membrane. Semiconductor etching and deposition techniques allow highly intricate surface details. The apertures in the guard can be made smaller to exclude more particles from contacting the membrane. The fine tolerances of lithographic deposition permit the guard to be positioned close to the membrane for a more compact overall design.

  Recently Added Patents
Single-electron detection method and apparatus for solid-state intensity image sensors with a charge splitting device
Method for using extended security system, extended security system and devices
Benzimidazole inhibition of biofilm formation
Compositions and methods for producing isoprene
Memory controller including a hardware compression and decompression engine for managing system memory and graphical operations
Second order correction circuit and method for bandgap voltage reference
  Randomly Featured Patents
Icon for a portion of a computer screen
Blind channel estimation in an orthogonal frequency division multiplexing system
Multiple line circuit track lighting system and fixture mounting adapters therefore
Clutch system and differential with same
Plural frequency matrix multiplexer
Contamination-resistant gas sensor element
Plant saucer with overflow relief valve
Dynamically partitioned CAM array
Alarm clock