Resources Contact Us Home
Process and apparatus for generating a strong phase shift optical pattern for use in an optical direct write lithography process

Image Number 9 for United States Patent #7189498.

The present invention provides methods and apparatus for accomplishing a strong phase shift direct write lithography process using reconfigurable optical mirrors. A maskless lithography system is provided. The maskless direct-write lithography system provided uses an array of mirrors configured to operate in a tilting mode, a piston-displacement mode, or both in combination. The controlled mirror array is used to generate strong phase shift optical patterns which are directed onto a photoimageable layer of a substrate in order to facilitate pattern transfer. In order to avoid constraining the system to forming edges of patterns aligned with the array of mirrors, gray-scale techniques are used for subpixel feature placement.

  Recently Added Patents
Cytokine biomarkers as predictive biomarkers of clinical response for Glatiramer acetate
Light emitting element, method for manufacturing the light emitting element, optical element and method for manufacturing the optical element
Controller for machine tool and five-axis simultaneous control machine tool controlled thereby
Prompt gap varying optical filter, analytical instrument, optical device, and characteristic measurement method
Using interrupted through-silicon-vias in integrated circuits adapted for stacking
Solid state lighting circuit and controls
Novelty snacks and method of manufacture of same
  Randomly Featured Patents
Combined lamp and meter
Adaptive maximum likelihood demodulator
Oral hygiene product
Zeolite L use in dehydrocyclisation and isomerisation
Voltage source for gate oxide protection
Object recognition apparatus, computer readable medium storing object recognition program, and image retrieval service providing method
Failure mode effects mitigation in drive-by-wire systems
Packaging case
Synthesis of 3-ethoxy-4-ethoxycarbonyl phenyl acetic acid, a key acid synthon of repaglinide
Clutch wheel for a timepiece