Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Process and apparatus for generating a strong phase shift optical pattern for use in an optical direct write lithography process










Image Number 9 for United States Patent #7189498.

The present invention provides methods and apparatus for accomplishing a strong phase shift direct write lithography process using reconfigurable optical mirrors. A maskless lithography system is provided. The maskless direct-write lithography system provided uses an array of mirrors configured to operate in a tilting mode, a piston-displacement mode, or both in combination. The controlled mirror array is used to generate strong phase shift optical patterns which are directed onto a photoimageable layer of a substrate in order to facilitate pattern transfer. In order to avoid constraining the system to forming edges of patterns aligned with the array of mirrors, gray-scale techniques are used for subpixel feature placement.








 
 
  Recently Added Patents
Optical cable plug-in detection
Method and apparatus for laser strip splicing
System and method for burst separation and extended interleaving length
Closed-loop adaptive adjustment of pacing therapy based on cardiogenic impedance signals detected by an implantable medical device
MOS transistor having combined-source structure with low power consumption and method for fabricating the same
Cascode circuit device with improved reverse recovery characteristic
Method of synchronization for low power idle
  Randomly Featured Patents
Peptide extract of lupine and pharmaceutical or cosmetic or nutritional composition comprising same
Method of providing power to an integrated circuit
System and method for tracking and exploiting per station information from a multiple repeat manufacturing device
Liquid crystal display device with two capacitive electrode layers in specific locations
Variable alarm for communication devices
Electrical overhead cable rope comprising an integrated optical communication lead
Method, apparatus and computer program product for unstabilized approach alerting
Method to determine the state of charge and remaining life of lithium batteries used in oilfield services applications
Electric screwdriver
Alkylphosphonate diesters of N-phosphonomethylglycinate as herbicides