Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Overlay mark for aligning different layers on a semiconductor wafer










Image Number 8 for United States Patent #7180593.

The present invention provides an overlay mark for aligning different layers on a semiconductor wafer. The overlay mark comprises a bar-in-bar mark and two bar sets on the semiconductor wafer. The bar-in-bar mark comprises an inner bar mark positioned in one of the pre-layer and an outer bar mark positioned in the other pre-layer. The two bar sets are perpendicular to each other, and each of two bar sets comprises two parallel bars. The bars can be connected and the lengths of the bars can be the same or different.








 
 
  Recently Added Patents
Methods and systems for dynamic spectrum arbitrage
System and method for receiving MBMS broadcasting service
Method and apparatuses for solving weighted planar graphs
System and method for providing dynamic navigation through a property to a selected destination
Managing aging of silicon in an integrated circuit device
Apoptosis inductor extracted from potato, potato foodstuff containing the inductor, and processed product thereof
Cancer vaccines containing epitopes of oncofetal antigen
  Randomly Featured Patents
Tube packing extension assembly for use in high temperature gas flow sensing elements and the like
Image formation method using a photosensitive transfer material
Notification by task of completion of GSM operations at target node
Antenna device and radar apparatus
Optical disk
Radome
Uses for amino acid anticonvulsants
Grinding fixture and assembly
Self locking coupling mechanism for engaging and moving a load
Variable venturi type carburetor