Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Overlay mark for aligning different layers on a semiconductor wafer










Image Number 10 for United States Patent #7180593.

The present invention provides an overlay mark for aligning different layers on a semiconductor wafer. The overlay mark comprises a bar-in-bar mark and two bar sets on the semiconductor wafer. The bar-in-bar mark comprises an inner bar mark positioned in one of the pre-layer and an outer bar mark positioned in the other pre-layer. The two bar sets are perpendicular to each other, and each of two bar sets comprises two parallel bars. The bars can be connected and the lengths of the bars can be the same or different.








 
 
  Recently Added Patents
Information processing device and display control method
Architectural panel with Tarwe and grass
Aircraft drive
Medical capsule housing formed by thermal welding
Universal handle extension for unloading butterfly valve for tank trailer or other vehicle
Semiconductor memory device
Power supply input voltage detection circuit
  Randomly Featured Patents
Aquatic garment having an ergonomically curved opening
2,4-pyrimidinediamine compounds and prodrugs and their uses
Method of digitally processing and printing a page of an interactive document
Automobile suspension
System and method for utilizing a rendezvous mechanism for secure information exchange
Newsprint rewinder
Mobile phone
Slide fastener
Large area LED array and method for its manufacture
Detection of bacteroides gingivalis