Resources Contact Us Home
Overlay mark for aligning different layers on a semiconductor wafer

Image Number 10 for United States Patent #7180593.

The present invention provides an overlay mark for aligning different layers on a semiconductor wafer. The overlay mark comprises a bar-in-bar mark and two bar sets on the semiconductor wafer. The bar-in-bar mark comprises an inner bar mark positioned in one of the pre-layer and an outer bar mark positioned in the other pre-layer. The two bar sets are perpendicular to each other, and each of two bar sets comprises two parallel bars. The bars can be connected and the lengths of the bars can be the same or different.

  Recently Added Patents
Modular microscope construction
Implant for performance enhancement of selected transistors in an integrated circuit
Pixel structure of a solid-state image sensor employing a charge sorting method
Digital broadcast receiver and method for processing caption thereof
Hybrid coatings and associated methods of application
Rotation angle detecting device
System and method for leveraging independent innovation in entertainment content and graphics hardware
  Randomly Featured Patents
Transmission characteristics analyzing device and program
Transfer device for a four-wheel drive vehicle
Sparring device
Rodent trap
Electrospray methods and apparatus for trace analysis
Method of injection moulding pallets
Shellfish processing
Optically active cyano-biphenyl compounds and liquid crystal materials containing them
Method for separating off solid materials
Container for collection of concentrate